Issued Patents All Time
Showing 1–25 of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11527399 | Wafer cleaning apparatus based on light irradiation and wafer cleaning system including the same | Byungkwon Cho, Sangjine Park, Seulgee Jeon, Jihoon Jeong, Seongsik Hong | 2022-12-13 |
| 11342203 | Substrate cleaning apparatus and substrate cleaning method using the same | Jihoon Jeong, Mihyun PARK, Kwangwook Lee, Kuntack Lee, Hayoung JEON +2 more | 2022-05-24 |
| 11302526 | Supercritical drying apparatus and method of drying substrate using the same | Sangjine Park, Byung-Kwon Cho, Jihoon Jeong, Youngtak KIM, Seulgee Jeon | 2022-04-12 |
| 10580617 | Method and apparatus for plasma etching | Kijong Park, Jun-Youl Yang, Kyunghyun Kim, Taeheon Kim, Jae-Jin Shin | 2020-03-03 |
| 10361100 | Apparatus and methods for treating a substrate | Hyosan Lee, Kyoungseob Kim, Kwangsu Kim, Seokhoon Kim, Kuntack Lee +2 more | 2019-07-23 |
| 10242880 | Method of wet etching and method of fabricating semiconductor device using the same | Kwangsu Kim, Se-Ho Cha, Keonyoung Kim, Kyunghyun Kim, ChangSup Mun +4 more | 2019-03-26 |
| 10155903 | Metal etchant compositions and methods of fabricating a semiconductor device using the same | Hyosan Lee, Kyoungseob Kim, Kuntack Lee, Jihoon Jeong, Chen Lin +1 more | 2018-12-18 |
| 10128120 | Method of treating a layer | Kwangsu Kim, Byoung Jae Park, Kyunghyun Kim, ChangSup Mun, Kijong Park | 2018-11-13 |
| 10096453 | Method and apparatus for plasma etching | Kijong Park, Jun-Youl Yang, Kyunghyun Kim, Taeheon Kim, Jae-Jin Shin | 2018-10-09 |
| 10084051 | Semiconductor devices including field effect transistors and methods of fabricating the same | Sangjine Park, Jae Hwan LEE | 2018-09-25 |
| 9941110 | Manufacturing method and fluid supply system for treating substrate | Jung-Min Oh, Hyosan Lee, Kyoungseob Kim, Seokhoon Kim, Kuntack Lee +2 more | 2018-04-10 |
| 9934959 | Method and apparatus for purifying cleaning agent | Yong-Jhin Cho, Jung-Min Oh, Yongmyung Jun, Kuntack Lee, Hyosan Lee | 2018-04-03 |
| 9859432 | Semiconductor devices having spacer protection pattern | Sangjine Park, Hagju Cho, Byungjae PARK, Jeongnam Han | 2018-01-02 |
| 9735351 | Magneto-resistance random access memory device and method of manufacturing the same | Wonjun Lee, Inseak Hwang, Changkyu Lee, Jinhye Bae, Hyunchul Shin +2 more | 2017-08-15 |
| 9677002 | Etching composition | Sang Won Bae, Byoungho Kwon, Bo Yun Kim, Hongjin Kim, Sungoh Park +3 more | 2017-06-13 |
| 9660186 | Method of inspecting by-products and method of manufacturing semiconductor device using the same | Jinhye Bae, Wonjun Lee, Yoonsung Han, Hoon Han, Kyu-Man HWANG | 2017-05-23 |
| 9627233 | Substrate treating apparatus | Seokhoon Kim, Yongmyung Jun, Kyoungseob Kim, Jung-Min Oh, Kuntack Lee +2 more | 2017-04-18 |
| 9595434 | Apparatus and methods for manufacturing semiconductor devices and treating substrates | Kyoungseob Kim, Kyoung Hwan Kim, Seokhoon Kim, Kuntack Lee, Hyosan Lee | 2017-03-14 |
| 9589901 | Semiconductor wafers including indications of crystal orientation and methods of forming the same | Tae-Hyoung Koo, Samjong Choi, Dongjun Lee | 2017-03-07 |
| 9534839 | Apparatus and methods for treating a substrate | Hyosan Lee, Kyongseob Kim, Kwangsu Kim, Seokhoon Kim, Kuntack Lee +2 more | 2017-01-03 |
| 9524864 | Manufacturing method and fluid supply system for treating substrate | Jung-Min Oh, Hyosan Lee, Kyoungseob Kim, Seokhoon Kim, Kuntack Lee +2 more | 2016-12-20 |
| 9368647 | Compositions for etching | Young-Taek Hong, Jinuk Lee, Junghun Lim, Jaewan Park, Chanjin Jeong +11 more | 2016-06-14 |
| 9165759 | Etching composition and method of manufacturing semiconductor device using the same | Sang Won Bae, Byoungho Kwon, Bo Yun Kim, Hongjin Kim, Sungoh Park +3 more | 2015-10-20 |
| 9136120 | Compositions for etching and methods of forming a semiconductor device using the same | Young-Taek Hong, Jinuk Lee, Junghun Lim, Jaewan Park, Chanjin Jeong +11 more | 2015-09-15 |
| 9027576 | Substrate treatment systems using supercritical fluid | Yong-Jhin Cho, Kyoungseob Kim, Kwangsu Kim, Seokhoon Kim, Jung-Min Oh +3 more | 2015-05-12 |