Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11342203 | Substrate cleaning apparatus and substrate cleaning method using the same | Jihoon Jeong, Mihyun PARK, Yongsun Ko, Kuntack Lee, Hayoung JEON +2 more | 2022-05-24 |
| 8822299 | Method of fabricating semiconductor device | Inseak Hwang | 2014-09-02 |