Issued Patents All Time
Showing 1–25 of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12319841 | Slurry composition for chemical mechanical polishing | Inkwon KIM, Yearin Byun, Sangkyun Kim, Sanghyun Park, Wonki HUR | 2025-06-03 |
| 12234400 | Etchant composition for etching silicon germanium film and method of manufacturing integrated circuit device by using the same | Changjun PARK, Jaesung Lee, Junghun Lim, Jungmin OH, Sangwon BAE | 2025-02-25 |
| 11795550 | Etching composition, a method of etching a metal barrier layer and a metal layer using the same, and method of manufacturing semiconductor device using the same | Jungah Kim, Mihyun PARK, Jinwoo Lee, Keonyoung Kim, Hoon Han +2 more | 2023-10-24 |
| 11610788 | Process chamber and substrate processing apparatus including the same | Yong-Jhin Cho, Young-Hoo Kim, Jihoon Jeong, Yungjun Kim, Jung-Min Oh +1 more | 2023-03-21 |
| 11427759 | Etchant compositions for metal-containing films and methods of manufacturing integrated circuit devices using the etchant compositions | Kihun Song, Jungmin OH, Hyojoong YOON, Minjung Kim, Jongwook Baek | 2022-08-30 |
| 11390805 | Etching composition and method for manufacturing semiconductor device using the same | Jae Sung Lee, Jung Hun Lim, Mihyun PARK, Changsu Jeon, Jung-Min Oh +1 more | 2022-07-19 |
| 11189503 | Substrate drying method, photoresist developing method, photolithography method including the same, and substrate drying system | Young-Hoo Kim, Kuntack Lee, Yong-Jhin Cho, Chawon Koh, Sunghyun Park +2 more | 2021-11-30 |
| 11168253 | Silicon layer etchant composition and method of forming pattern by using the same | Changsu Jeon, Jungmin OH, Hoon Han, Jinkyu ROH, Hyojoong YOON +1 more | 2021-11-09 |
| 11028488 | Etching composition, a method of etching a metal barrier layer and a metal layer using the same, and method of manufacturing semiconductor device using the same | Jungah Kim, Mihyun PARK, Jinwoo Lee, Keonyoung Kim, Hoon Han +2 more | 2021-06-08 |
| 10991600 | Process chamber and substrate processing apparatus including the same | Yong-Jhin Cho, Young-Hoo Kim, Jihoon Jeong, Yungjun Kim, Jung-Min Oh +1 more | 2021-04-27 |
| 10837115 | Pre-treatment composition before etching SiGe and method of fabricating semiconductor device using the same | Soojin Kim, Hyo-Sun Lee, Jung-Min Oh, Donghyun Kim, Haksoo Kim +2 more | 2020-11-17 |
| 10388537 | Cleaning apparatus, chemical mechanical polishing system including the same, cleaning method after chemical mechanical polishing, and method of manufacturing semiconductor device including the same | Chae Lyoung Kim, Tae Hong Kim, Jung-Min Oh, Yungjun Kim, Ingi Kim +2 more | 2019-08-20 |
| 10361100 | Apparatus and methods for treating a substrate | Yongsun Ko, Kyoungseob Kim, Kwangsu Kim, Seokhoon Kim, Kuntack Lee +2 more | 2019-07-23 |
| 10186427 | Substrate treating apparatus | Kyoung Hwan Kim, Ingi Kim, Mihyun PARK, Young-Hoo Kim, Ui-soon Park +2 more | 2019-01-22 |
| 10155903 | Metal etchant compositions and methods of fabricating a semiconductor device using the same | Yongsun Ko, Kyoungseob Kim, Kuntack Lee, Jihoon Jeong, Chen Lin +1 more | 2018-12-18 |
| 9941110 | Manufacturing method and fluid supply system for treating substrate | Jung-Min Oh, Yongsun Ko, Kyoungseob Kim, Seokhoon Kim, Kuntack Lee +2 more | 2018-04-10 |
| 9934959 | Method and apparatus for purifying cleaning agent | Yong-Jhin Cho, Jung-Min Oh, Yongmyung Jun, Yongsun Ko, Kuntack Lee | 2018-04-03 |
| 9852921 | Substrate treating apparatus and method of treating substrate | Kyoung Hwan Kim, Ingi Kim, Mihyun PARK, Young-Hoo Kim, Ui-soon Park +2 more | 2017-12-26 |
| 9831081 | Method for treating substrate | Jihoon Jeong, Jung-Min Oh, Kuntack Lee | 2017-11-28 |
| 9677002 | Etching composition | Sang Won Bae, Yongsun Ko, Byoungho Kwon, Bo Yun Kim, Hongjin Kim +3 more | 2017-06-13 |
| 9595434 | Apparatus and methods for manufacturing semiconductor devices and treating substrates | Kyoungseob Kim, Yongsun Ko, Kyoung Hwan Kim, Seokhoon Kim, Kuntack Lee | 2017-03-14 |
| 9534839 | Apparatus and methods for treating a substrate | Yongsun Ko, Kyongseob Kim, Kwangsu Kim, Seokhoon Kim, Kuntack Lee +2 more | 2017-01-03 |
| 9524864 | Manufacturing method and fluid supply system for treating substrate | Jung-Min Oh, Yongsun Ko, Kyoungseob Kim, Seokhoon Kim, Kuntack Lee +2 more | 2016-12-20 |
| 9165759 | Etching composition and method of manufacturing semiconductor device using the same | Sang Won Bae, Yongsun Ko, Byoungho Kwon, Bo Yun Kim, Hongjin Kim +3 more | 2015-10-20 |
| 9153597 | Methods of manufacturing a three-dimensional semiconductor device | Young-Hoo Kim, Sang Won Bae, Kuntack Lee | 2015-10-06 |