Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11610788 | Process chamber and substrate processing apparatus including the same | Yong-Jhin Cho, Young-Hoo Kim, Jihoon Jeong, Jung-Min Oh, Kuntack Lee +1 more | 2023-03-21 |
| 11590628 | Rotary body module and chemical mechanical polishing apparatus having the same | Yonghee Lee, Hyunjoon Park, Taemin Earmme, Seungchul Han, Byoungho Kwon +1 more | 2023-02-28 |
| 10991600 | Process chamber and substrate processing apparatus including the same | Yong-Jhin Cho, Young-Hoo Kim, Jihoon Jeong, Jung-Min Oh, Kuntack Lee +1 more | 2021-04-27 |
| 10825698 | Substrate drying apparatus, facility of manufacturing semiconductor device, and method of drying substrate | Yong-Jhin Cho, Young-Hoo Kim, Jihoon Jeong, Kuntack Lee | 2020-11-03 |
| 10388537 | Cleaning apparatus, chemical mechanical polishing system including the same, cleaning method after chemical mechanical polishing, and method of manufacturing semiconductor device including the same | Chae Lyoung Kim, Tae Hong Kim, Jung-Min Oh, Ingi Kim, Boun Yoon +2 more | 2019-08-20 |