| 11610788 |
Process chamber and substrate processing apparatus including the same |
Yong-Jhin Cho, Young-Hoo Kim, Jihoon Jeong, Jung-Min Oh, Kuntack Lee +1 more |
2023-03-21 |
| 11590628 |
Rotary body module and chemical mechanical polishing apparatus having the same |
Yonghee Lee, Hyunjoon Park, Taemin Earmme, Seungchul Han, Byoungho Kwon +1 more |
2023-02-28 |
| 10991600 |
Process chamber and substrate processing apparatus including the same |
Yong-Jhin Cho, Young-Hoo Kim, Jihoon Jeong, Jung-Min Oh, Kuntack Lee +1 more |
2021-04-27 |
| 10825698 |
Substrate drying apparatus, facility of manufacturing semiconductor device, and method of drying substrate |
Yong-Jhin Cho, Young-Hoo Kim, Jihoon Jeong, Kuntack Lee |
2020-11-03 |
| 10388537 |
Cleaning apparatus, chemical mechanical polishing system including the same, cleaning method after chemical mechanical polishing, and method of manufacturing semiconductor device including the same |
Chae Lyoung Kim, Tae Hong Kim, Jung-Min Oh, Ingi Kim, Boun Yoon +2 more |
2019-08-20 |
