Issued Patents All Time
Showing 1–25 of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12322587 | Substrate drying apparatus and semiconductor device manufacturing method using same | Ji Hoon Jeong, Seo Hyun Kim, Sang-Jine Park, Kun-Tack Lee | 2025-06-03 |
| 12211716 | Substrate processing apparatus and substrate processing method | Jaeseong Lee, Kihoon Choi, Hae-Won Choi, Jihoon Jeong, Seohyun Kim +2 more | 2025-01-28 |
| 12198923 | Substrate processing method and substrate processing system | Hae-Won Choi, Anton Koriakin, Sangjine Park, Keonyoung Kim, Sukhoon Kim +3 more | 2025-01-14 |
| 12165866 | Wafer cleaning apparatus and wafer cleaning method using the same | Sung Hyun Park, Seo Hyun Kim, Seung Ho Kim, Young-chan Kim, Tae Hong Kim +4 more | 2024-12-10 |
| 12042828 | Wafer cleaning apparatus and wafer cleaning method using the same | Seung Min Shin, Hun Jae Jang, Seok Hoon Kim, In-Gi Kim, Tae Hong Kim +3 more | 2024-07-23 |
| 11887868 | Substrate processing apparatus and apparatus for manufacturing integrated circuit device | Sang-Jine Park, Yong-Jhin Cho, Yeon-Jin Gil, Ji Hoon Jeong, Byung-Kwon Cho +2 more | 2024-01-30 |
| 11862457 | Wafer cleaning apparatus, method for cleaning wafer and method for fabricating semiconductor device | Seongkeun Cho, Seung Min Shin, Tae Min Earmme, Kun-Tack Lee, Hun Jae Jang +1 more | 2024-01-02 |
| 11742221 | Dry cleaning apparatus and dry cleaning method | Seung Min Shin, Seok Hoon Kim, In-Gi Kim, Tae Hong Kim, Sung Hyun Park +3 more | 2023-08-29 |
| 11721565 | Multi-chamber apparatus | Yong-Jun Choi, Seok Hoon Kim, In-Gi Kim, Sung Hyun Park, Seung Min Shin +4 more | 2023-08-08 |
| 11648594 | Wafer cleaning apparatus and wafer cleaning method using the same | Seung Min Shin, Hun Jae Jang, Seok Hoon Kim, In-Gi Kim, Tae Hong Kim +3 more | 2023-05-16 |
| 11610788 | Process chamber and substrate processing apparatus including the same | Yong-Jhin Cho, Jihoon Jeong, Yungjun Kim, Jung-Min Oh, Kuntack Lee +1 more | 2023-03-21 |
| 11581182 | Wafer cleaning apparatus, method for cleaning wafer and method for fabricating semiconductor device | Seongkeun Cho, Seung Min Shin, Tae Min Earmme, Kun-Tack Lee, Hun Jae Jang +1 more | 2023-02-14 |
| 11189503 | Substrate drying method, photoresist developing method, photolithography method including the same, and substrate drying system | Kuntack Lee, Yong-Jhin Cho, Chawon Koh, Sunghyun Park, Hyosan Lee +2 more | 2021-11-30 |
| 11149234 | Cleaning composition, cleaning apparatus, and method of fabricating semiconductor device using the same | Mi Hyun Park, Jung-Min Oh, Hyo-San Lee, Tae-Keun Kim, Ye Rim Yeon +3 more | 2021-10-19 |
| 11087996 | Dry cleaning apparatus and dry cleaning method | Seung Min Shin, Seok Hoon Kim, In-Gi Kim, Tae Hong Kim, Sung Hyun Park +3 more | 2021-08-10 |
| 10991600 | Process chamber and substrate processing apparatus including the same | Yong-Jhin Cho, Jihoon Jeong, Yungjun Kim, Jung-Min Oh, Kuntack Lee +1 more | 2021-04-27 |
| 10985036 | Substrate processing apparatus and apparatus for manufacturing integrated circuit device | Sang-Jine Park, Yong-Jhin Cho, Yeon-Jin Gil, Ji Hoon Jeong, Byung-Kwon Cho +2 more | 2021-04-20 |
| 10825698 | Substrate drying apparatus, facility of manufacturing semiconductor device, and method of drying substrate | Yong-Jhin Cho, Jihoon Jeong, Yungjun Kim, Kuntack Lee | 2020-11-03 |
| 10576582 | Spot heater and device for cleaning wafer using the same | Il-Sang Lee, Yong-Sun Ko, Chang-Gil Ryu, Kun-Tack Lee, Hyo-San Lee | 2020-03-03 |
| 10332762 | Chemical liquid supply apparatus and semiconductor processing apparatus having the same | Il-Sang Lee, In-Gi Kim, Kyoung Hwan Kim, Hyo-San Lee, Sang Won Bae +2 more | 2019-06-25 |
| 10186427 | Substrate treating apparatus | Kyoung Hwan Kim, Ingi Kim, Mihyun PARK, Ui-soon Park, Jung-Min Oh +2 more | 2019-01-22 |
| 10029332 | Spot heater and device for cleaning wafer using the same | Il-Sang Lee, Yong-Sun Ko, Chang-Gil Ryu, Kun-Tack Lee, Hyo-San Lee | 2018-07-24 |
| 9852921 | Substrate treating apparatus and method of treating substrate | Kyoung Hwan Kim, Ingi Kim, Mihyun PARK, Ui-soon Park, Jung-Min Oh +2 more | 2017-12-26 |
| 9153597 | Methods of manufacturing a three-dimensional semiconductor device | Sang Won Bae, Kuntack Lee, Hyosan Lee | 2015-10-06 |
| 8795541 | Substrate processing method and substrate processing system for performing the same | Yong-Jhin Cho, Kun-Tack Lee, Hyo-San Lee, Jung Won Lee, Sang Won Bae +1 more | 2014-08-05 |