Issued Patents All Time
Showing 25 most recent of 56 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12408323 | Semiconductor memory device and method for manufacturing the same | Seongkeun Cho, Hee-Young Park, Jin Hyung Park, Jung Hyuk Jang, Chun Hyung Chung | 2025-09-02 |
| 12322587 | Substrate drying apparatus and semiconductor device manufacturing method using same | Ji Hoon Jeong, Seo Hyun Kim, Sang-Jine Park, Young-Hoo Kim | 2025-06-03 |
| 12165866 | Wafer cleaning apparatus and wafer cleaning method using the same | Sung Hyun Park, Seo Hyun Kim, Seung Ho Kim, Young-chan Kim, Young-Hoo Kim +4 more | 2024-12-10 |
| 12042828 | Wafer cleaning apparatus and wafer cleaning method using the same | Seung Min Shin, Hun Jae Jang, Seok Hoon Kim, Young-Hoo Kim, In-Gi Kim +3 more | 2024-07-23 |
| 11986921 | Chemical mechanical polishing apparatus, chemical mechanical polishing method and method for fabricating semiconductor device | Myung-Ki Hong, Yong Hee Lee, Byoung-ho Kwon | 2024-05-21 |
| 11923216 | Apparatus and method for treating substrate including process chambers and transfer chamber | Seung Min Shin, Sang Jin Park, Hae-Won Choi, Jang Jin LEE, Ji Hwan Park +4 more | 2024-03-05 |
| 11887868 | Substrate processing apparatus and apparatus for manufacturing integrated circuit device | Young-Hoo Kim, Sang-Jine Park, Yong-Jhin Cho, Yeon-Jin Gil, Ji Hoon Jeong +2 more | 2024-01-30 |
| 11862457 | Wafer cleaning apparatus, method for cleaning wafer and method for fabricating semiconductor device | Seongkeun Cho, Young-Hoo Kim, Seung Min Shin, Tae Min Earmme, Hun Jae Jang +1 more | 2024-01-02 |
| 11721565 | Multi-chamber apparatus | Yong-Jun Choi, Seok Hoon Kim, Young-Hoo Kim, In-Gi Kim, Sung Hyun Park +4 more | 2023-08-08 |
| 11648594 | Wafer cleaning apparatus and wafer cleaning method using the same | Seung Min Shin, Hun Jae Jang, Seok Hoon Kim, Young-Hoo Kim, In-Gi Kim +3 more | 2023-05-16 |
| 11605545 | Wafer cleaning equipment | Hun Jae Jang, Seung Min Shin, Seok Hoon Kim, In-Gi Kim, Tae Hong Kim +3 more | 2023-03-14 |
| 11581182 | Wafer cleaning apparatus, method for cleaning wafer and method for fabricating semiconductor device | Seongkeun Cho, Young-Hoo Kim, Seung Min Shin, Tae Min Earmme, Hun Jae Jang +1 more | 2023-02-14 |
| 11227761 | Method of removing chemicals from a substrate | Ji Hoon Jeong, Jung-Min Oh, Hyo-San Lee | 2022-01-18 |
| 10985036 | Substrate processing apparatus and apparatus for manufacturing integrated circuit device | Young-Hoo Kim, Sang-Jine Park, Yong-Jhin Cho, Yeon-Jin Gil, Ji Hoon Jeong +2 more | 2021-04-20 |
| 10679843 | Method of treating substrates using supercritical fluids | Ji Hoon Jeong, Jung-Min Oh, Hyo-San Lee | 2020-06-09 |
| 10668403 | Source supplier for a supercritical fluid, substrate processing apparatus having the same | Jung-Min Oh, Ji Hoon Jeong, Dong-Gyun Han, Hyo-San Lee, Yong-Myung Jun | 2020-06-02 |
| 10576582 | Spot heater and device for cleaning wafer using the same | Young-Hoo Kim, Il-Sang Lee, Yong-Sun Ko, Chang-Gil Ryu, Hyo-San Lee | 2020-03-03 |
| 10435234 | Chemical liquid supply apparatus and semiconductor processing apparatus having the same | Yong-Jhin Cho, In Kwang Bae, Jung-Min Oh, Mi Hyun Park, Yong-Jun Choi | 2019-10-08 |
| 10083829 | Apparatus for treating substrates using supercritical fluids, substrate treatment system including the same and method of treating substrates using the same | Ji Hoon Jeong, Jung-Min Oh, Hyo-San Lee | 2018-09-25 |
| 10029332 | Spot heater and device for cleaning wafer using the same | Young-Hoo Kim, Il-Sang Lee, Yong-Sun Ko, Chang-Gil Ryu, Hyo-San Lee | 2018-07-24 |
| 9903651 | Sealing member and substrate processing apparatus including the same | Yong-Myung Jun, Yong-Sun Ko, Il-Sang Lee, Ji Hoon Jeong, Yong-Jhin Cho +1 more | 2018-02-27 |
| 9754806 | Apparatus for treating wafers using supercritical fluid | Hyo-San Lee, Chang-Ki Hong, Jeong-Nam Han | 2017-09-05 |
| 9394509 | Cleaning solution composition and method of cleaning semiconductor device using the same | Sang Won Bae, Yong-Sun Ko, Seok Hoon Kim, In-Gi Kim, Jung-Min Oh +3 more | 2016-07-19 |
| 8951383 | Apparatus for treating wafers using supercritical fluid | Hyo-San Lee, Chang-Ki Hong, Jeong-Nam Han | 2015-02-10 |
| 8795541 | Substrate processing method and substrate processing system for performing the same | Yong-Jhin Cho, Hyo-San Lee, Young-Hoo Kim, Jung Won Lee, Sang Won Bae +1 more | 2014-08-05 |