Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11986921 | Chemical mechanical polishing apparatus, chemical mechanical polishing method and method for fabricating semiconductor device | Yong Hee Lee, Byoung-ho Kwon, Kun-Tack Lee | 2024-05-21 |
| 10525566 | Preparing conditioning disk for chemical mechanical polishing and chemical mechanical polishing method including the same | Yung Jun KIM, Sung Oh PARK, Hyo-San Lee, Joo Han Lee, Kyu-min Oh +3 more | 2020-01-07 |
| 8475238 | Polishing pads including sidewalls and related polishing apparatuses | Jae-Kwang Choi, Bo-Un Yoon | 2013-07-02 |