Issued Patents All Time
Showing 1–25 of 34 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12297385 | Etching compositions and methods for fabricating semiconductor devices by using the same | Min-Hyung Cho, HYO JOONG YOON, Min Ju IM, Jung-Min Oh, Sang Won Bae | 2025-05-13 |
| 12046464 | Substrate cleaning composition, method for cleaning substrate using the same, and method for fabricating semiconductor device using the same | Ga Young Song, Mi Hyun Park, Jong Kyoung Park, Jung-Youl Lee, Hyun Jin Kim +2 more | 2024-07-23 |
| 11676824 | Chemical mechanical polishing apparatus for controlling polishing uniformity | In Kwon Kim, Seung Ho Park, Sang Won Bae, Woo In LEE, Sun-jae Jang | 2023-06-13 |
| 11227761 | Method of removing chemicals from a substrate | Ji Hoon Jeong, Jung-Min Oh, Kun-Tack Lee | 2022-01-18 |
| 11149234 | Cleaning composition, cleaning apparatus, and method of fabricating semiconductor device using the same | Mi Hyun Park, Jung-Min Oh, Young-Hoo Kim, Tae-Keun Kim, Ye Rim Yeon +3 more | 2021-10-19 |
| 11142694 | Etchant composition and method of fabricating semiconductor device | Jung-a Kim, Young-chan Kim, Hoon Han, Jin Uk Lee, Jung Hun Lim +1 more | 2021-10-12 |
| 10795263 | Compositions for removing photoresist | Jung-Min Oh, Mi Hyun Park, Ji Hoon Jeong, Yong-Sun Ko, In-Gi Kim +4 more | 2020-10-06 |
| 10679843 | Method of treating substrates using supercritical fluids | Ji Hoon Jeong, Jung-Min Oh, Kun-Tack Lee | 2020-06-09 |
| 10668403 | Source supplier for a supercritical fluid, substrate processing apparatus having the same | Jung-Min Oh, Ji Hoon Jeong, Dong-Gyun Han, Kun-Tack Lee, Yong-Myung Jun | 2020-06-02 |
| 10576582 | Spot heater and device for cleaning wafer using the same | Young-Hoo Kim, Il-Sang Lee, Yong-Sun Ko, Chang-Gil Ryu, Kun-Tack Lee | 2020-03-03 |
| 10525566 | Preparing conditioning disk for chemical mechanical polishing and chemical mechanical polishing method including the same | Myung-Ki Hong, Yung Jun KIM, Sung Oh PARK, Joo Han Lee, Kyu-min Oh +3 more | 2020-01-07 |
| 10395951 | Method of cleaning a substrate and apparatus for performing the same | Seok Hoon Kim, Kyoung-Seob Kim, Dong Chul Kim | 2019-08-27 |
| 10332762 | Chemical liquid supply apparatus and semiconductor processing apparatus having the same | Young-Hoo Kim, Il-Sang Lee, In-Gi Kim, Kyoung Hwan Kim, Sang Won Bae +2 more | 2019-06-25 |
| 10083829 | Apparatus for treating substrates using supercritical fluids, substrate treatment system including the same and method of treating substrates using the same | Ji Hoon Jeong, Jung-Min Oh, Kun-Tack Lee | 2018-09-25 |
| 10029332 | Spot heater and device for cleaning wafer using the same | Young-Hoo Kim, Il-Sang Lee, Yong-Sun Ko, Chang-Gil Ryu, Kun-Tack Lee | 2018-07-24 |
| 10025192 | Methods of manufacturing semiconductor devices using a composition for removing photoresist and methods of removing photoresist from a semiconductor substrate | Jung-Min Oh, Mi Hyun Park, Ji Hoon Jeong, Yong-Sun Ko, In-Gi Kim +4 more | 2018-07-17 |
| 9754806 | Apparatus for treating wafers using supercritical fluid | Chang-Ki Hong, Kun-Tack Lee, Jeong-Nam Han | 2017-09-05 |
| 9394509 | Cleaning solution composition and method of cleaning semiconductor device using the same | Sang Won Bae, Yong-Sun Ko, Seok Hoon Kim, In-Gi Kim, Jung-Min Oh +3 more | 2016-07-19 |
| 8951383 | Apparatus for treating wafers using supercritical fluid | Chang-Ki Hong, Kun-Tack Lee, Jeong-Nam Han | 2015-02-10 |
| 8795541 | Substrate processing method and substrate processing system for performing the same | Yong-Jhin Cho, Kun-Tack Lee, Young-Hoo Kim, Jung Won Lee, Sang Won Bae +1 more | 2014-08-05 |
| 8790470 | Etching, cleaning and drying methods using supercritical fluid and chamber systems using these methods | Chang-Ki Hong, Kun-Tack Lee, Woo-Gwan Shim, Jeong-Nam Han, Jung-Min Oh +4 more | 2014-07-29 |
| 8766343 | Integrated circuit capacitors having sidewall supports | Dae-Hyuk Kang, Bo-Un Yoon, Kun-Tack Lee, Woo-Gwan Shim, Ji-Hoon Cha +3 more | 2014-07-01 |
| 8685272 | Composition for etching silicon oxide layer, method for etching semiconductor device using the same, and composition for etching semiconductor device | Go-Un Kim, Myung Kook Park, Ho-Seok Yang, Jeong-Nam Han, Chang-Ki Hong | 2014-04-01 |
| 8585917 | Etching, cleaning and drying methods using supercritical fluid and chamber systems using these methods | Chang-Ki Hong, Kun-Tack Lee, Woo-Gwan Shim, Jeong-Nam Han, Jung-Min Oh +4 more | 2013-11-19 |
| 8557651 | Method of manufacturing a semiconductor device using an etchant | Bo-Un Yoon, Kun-Tack Lee, Hag-Ju Cho, Sang-Jin Hyun, Hoon-Joo Na +1 more | 2013-10-15 |