Issued Patents All Time
Showing 1–25 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11664243 | Substrate processing apparatus | Sang-Jine Park, Seung Ho Lee, Bo-Wo Choi, Yong-Sun Ko | 2023-05-30 |
| 11361960 | Substrate processing apparatus and substrate processing system including the same | Won Ho JANG, Jeong-Yong Bae, Woo Young Kim, Hyun-Jung Lee, Se Jin Park +3 more | 2022-06-14 |
| 10910237 | Operating method for wet etching system and related system | Sang Hoon Jeong, Yong-Sun Ko, Dong Ha Kim, Tae Heon Kim, Chang-Sup Mun +2 more | 2021-02-02 |
| 10707071 | Substrate processing apparatus and substrate processing system including the same | Won Ho JANG, Hyun-Jung Lee, Se Jin Park, Yong-Sun Ko, Dong-Gyun Han +3 more | 2020-07-07 |
| 8790470 | Etching, cleaning and drying methods using supercritical fluid and chamber systems using these methods | Hyo-San Lee, Chang-Ki Hong, Kun-Tack Lee, Jeong-Nam Han, Jung-Min Oh +4 more | 2014-07-29 |
| 8766343 | Integrated circuit capacitors having sidewall supports | Dae-Hyuk Kang, Bo-Un Yoon, Kun-Tack Lee, Ji-Hoon Cha, Im-Soo Park +3 more | 2014-07-01 |
| 8637942 | Transistor having a metal nitride layer pattern, etchant and methods of forming the same | Sang-Yong Kim, Ji-Hoon Cha, Chang-Ki Hong, Sang-jun Choi | 2014-01-28 |
| 8585917 | Etching, cleaning and drying methods using supercritical fluid and chamber systems using these methods | Hyo-San Lee, Chang-Ki Hong, Kun-Tack Lee, Jeong-Nam Han, Jung-Min Oh +4 more | 2013-11-19 |
| 8119476 | Methods of forming integrated circuit capacitors having sidewall supports and capacitors formed thereby | Dae-Hyuk Kang, Bo-Un Yoon, Kun-Tack Lee, Ji-Hoon Cha, Im-Soo Park +3 more | 2012-02-21 |
| 8084367 | Etching, cleaning and drying methods using supercritical fluid and chamber systems using these methods | Hyo-San Lee, Chang-Ki Hong, Kun-Tack Lee, Jeong-Nam Han, Jung-Min Oh +4 more | 2011-12-27 |
| 8058180 | Methods of fabricating a semiconductor device using a dilute aqueous solution of an ammonia and peroxide mixture | Doo Won Kwon, Hyung-Ho Ko, Chang-Sup Mun, Im-Soo Park, Yu-Kyung Kim +1 more | 2011-11-15 |
| 7985999 | Semiconductor device having capacitor | Jung-Min Oh, Jeong-Nam Han, Chang-Ki Hong, Im-Soo Park | 2011-07-26 |
| 7879735 | Cleaning solution for silicon surface and methods of fabricating semiconductor device using the same | Sang-Yong Kim, Chang-Ki Hong | 2011-02-01 |
| 7825030 | Method of forming a spacer | Yu-Kyung Kim, Kun-Tack Lee, Chang-Ki Hong | 2010-11-02 |
| 7820508 | Semiconductor device having capacitor and method of fabricating the same | Jung-Min Oh, Jeong-Nam Han, Chang-Ki Hong, Im-Soo Park | 2010-10-26 |
| 7745338 | Method of forming fine pitch hardmask patterns and method of forming fine patterns of semiconductor device using the same | Ji-Hoon Cha, Chang-Ki Hong, Kun-Tack Lee, Chang-Sup Mun, Ho-wook Choi | 2010-06-29 |
| 7700496 | Transistor having a metal nitride layer pattern, etchant and methods of forming the same | Sang-Yong Kim, Ji-Hoon Cha, Chang-Ki Hong, Sang-jun Choi | 2010-04-20 |
| 7544985 | Semiconductor capacitor structure and method for manufacturing the same | Chang-Ki Hong, Sang-jun Choi, Jeong-Nam Han | 2009-06-09 |
| 7498217 | Methods of manufacturing semiconductor memory devices with unit cells having charge trapping layers | Jung-Min Oh, Jeong-Nam Han, Chang-Ki Hong, Kun-Tack Lee, Dae-Hyuk Kang +1 more | 2009-03-03 |
| 7459370 | Method of fabricating semiconductor memory device having plurality of storage node electrodes | Dae-Hyuk Kang, Jung-Min Oh, Chang-Ki Hong, Sang-jun Choi | 2008-12-02 |
| 7449417 | Cleaning solution for silicon surface and methods of fabricating semiconductor device using the same | Sang-Yong Kim, Chang-Ki Hong | 2008-11-11 |
| 7435644 | Method of manufacturing capacitor of semiconductor device | Jung-Min Oh, Chang-Ki Hong, Sang-jun Choi, Sang-Yong Kim | 2008-10-14 |
| 7354868 | Methods of fabricating a semiconductor device using a dilute aqueous solution of an ammonia and peroxide mixture | Doo Won Kwon, Hyung-Ho Ko, Chang-Sup Mun, Im-Soo Park, Yu-Kyung Kim +1 more | 2008-04-08 |
| 7344999 | Method for cleaning substrate having exposed silicon and silicon germanium layers and related method for fabricating semiconductor device | Chang-Sup Mun, Han-ku Cho, Chang-Ki Hong, Doo Won Kwon | 2008-03-18 |
| 7322385 | Apparatus for drying substrate and method thereof | Sang-Yong Kim, Chang-Ki Hong, Sang-jun Choi | 2008-01-29 |