| 10910237 |
Operating method for wet etching system and related system |
Sang Hoon Jeong, Yong-Sun Ko, Dong Ha Kim, Tae Heon Kim, Woo-Gwan Shim +2 more |
2021-02-02 |
| 8822287 |
Methods of manufacturing semiconductor devices |
Hyo Jung Kim, Ki-Hyun Hwang, Kyung-Hyun Kim, Han-Mei Choi, Dong-Chul Yoo +4 more |
2014-09-02 |
| 8592269 |
Method of manufacturing gate structure and method of manufacturing semiconductor device including the same |
Ki-Hyun Hwang, Won-Jun Jang, Jae Young Ahn, Jung-Hyun Park |
2013-11-26 |
| 8580648 |
Capacitor having an electrode structure, method of manufacturing a capacitor having an electrode structure and semiconductor device having an electrode structure |
Suk-Hun Choi, Kyung-Hyun Kim, Sung Jun Kim, Jin-Il Lee |
2013-11-12 |
| 8058180 |
Methods of fabricating a semiconductor device using a dilute aqueous solution of an ammonia and peroxide mixture |
Doo Won Kwon, Hyung-Ho Ko, Woo-Gwan Shim, Im-Soo Park, Yu-Kyung Kim +1 more |
2011-11-15 |
| 7745338 |
Method of forming fine pitch hardmask patterns and method of forming fine patterns of semiconductor device using the same |
Ji-Hoon Cha, Chang-Ki Hong, Kun-Tack Lee, Woo-Gwan Shim, Ho-wook Choi |
2010-06-29 |
| 7435301 |
Cleaning solution of silicon germanium layer and cleaning method using the same |
Doo Won Kwon, Hyung-Ho Ko, Chang-Ki Hong, Sang-jun Choi |
2008-10-14 |
| 7354868 |
Methods of fabricating a semiconductor device using a dilute aqueous solution of an ammonia and peroxide mixture |
Doo Won Kwon, Hyung-Ho Ko, Woo-Gwan Shim, Im-Soo Park, Yu-Kyung Kim +1 more |
2008-04-08 |
| 7344999 |
Method for cleaning substrate having exposed silicon and silicon germanium layers and related method for fabricating semiconductor device |
Woo-Gwan Shim, Han-ku Cho, Chang-Ki Hong, Doo Won Kwon |
2008-03-18 |
| 7309683 |
Cleaning composition and method of cleaning a semiconductor device using the same |
Chang-Ki Hong, Sang-jun Choi, Woo-Sung Han |
2007-12-18 |