CM

Chang-Sup Mun

Samsung: 10 patents #13,191 of 75,807Top 20%
Overall (All Time): #501,157 of 4,157,543Top 15%
10
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
10910237 Operating method for wet etching system and related system Sang Hoon Jeong, Yong-Sun Ko, Dong Ha Kim, Tae Heon Kim, Woo-Gwan Shim +2 more 2021-02-02
8822287 Methods of manufacturing semiconductor devices Hyo Jung Kim, Ki-Hyun Hwang, Kyung-Hyun Kim, Han-Mei Choi, Dong-Chul Yoo +4 more 2014-09-02
8592269 Method of manufacturing gate structure and method of manufacturing semiconductor device including the same Ki-Hyun Hwang, Won-Jun Jang, Jae Young Ahn, Jung-Hyun Park 2013-11-26
8580648 Capacitor having an electrode structure, method of manufacturing a capacitor having an electrode structure and semiconductor device having an electrode structure Suk-Hun Choi, Kyung-Hyun Kim, Sung Jun Kim, Jin-Il Lee 2013-11-12
8058180 Methods of fabricating a semiconductor device using a dilute aqueous solution of an ammonia and peroxide mixture Doo Won Kwon, Hyung-Ho Ko, Woo-Gwan Shim, Im-Soo Park, Yu-Kyung Kim +1 more 2011-11-15
7745338 Method of forming fine pitch hardmask patterns and method of forming fine patterns of semiconductor device using the same Ji-Hoon Cha, Chang-Ki Hong, Kun-Tack Lee, Woo-Gwan Shim, Ho-wook Choi 2010-06-29
7435301 Cleaning solution of silicon germanium layer and cleaning method using the same Doo Won Kwon, Hyung-Ho Ko, Chang-Ki Hong, Sang-jun Choi 2008-10-14
7354868 Methods of fabricating a semiconductor device using a dilute aqueous solution of an ammonia and peroxide mixture Doo Won Kwon, Hyung-Ho Ko, Woo-Gwan Shim, Im-Soo Park, Yu-Kyung Kim +1 more 2008-04-08
7344999 Method for cleaning substrate having exposed silicon and silicon germanium layers and related method for fabricating semiconductor device Woo-Gwan Shim, Han-ku Cho, Chang-Ki Hong, Doo Won Kwon 2008-03-18
7309683 Cleaning composition and method of cleaning a semiconductor device using the same Chang-Ki Hong, Sang-jun Choi, Woo-Sung Han 2007-12-18