Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7745338 | Method of forming fine pitch hardmask patterns and method of forming fine patterns of semiconductor device using the same | Ji-Hoon Cha, Chang-Ki Hong, Kun-Tack Lee, Woo-Gwan Shim, Chang-Sup Mun | 2010-06-29 |