Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11361960 | Substrate processing apparatus and substrate processing system including the same | Won Ho JANG, Woo Young Kim, Hyun-Jung Lee, Se Jin Park, Yong-Sun Ko +3 more | 2022-06-14 |
| 10707071 | Substrate processing apparatus and substrate processing system including the same | Won Ho JANG, Hyun-Jung Lee, Se Jin Park, Yong-Sun Ko, Dong-Gyun Han +3 more | 2020-07-07 |
| 9529267 | Method for processing a substrate and apparatus for performing the same | Eun-Su Rho | 2016-12-27 |
| 8793898 | Apparatus and method for drying substrates | Young Ju Jeong, Bok Kyu LEE, Sun-kyu Hwang, Soo-Bin Yong | 2014-08-05 |
| 8714169 | Spin head, apparatus for treating substrate, and method for treating substrate | Taek Youb Lee, Choon Sik Kim | 2014-05-06 |
| 8702365 | Substrate processing apparatus and method for transferring substrate for the apparatus | Sun-Yong Park, Choon Sik Kim | 2014-04-22 |
| 8540854 | Apparatus and method for plating substrate | Yijung Kim, Eun-Su Rho | 2013-09-24 |
| 8257549 | Spin head, chuck pin used in the spin head, and method for treating a substrate with the spin head | Woo-Seok Lee, Woo Young Kim | 2012-09-04 |
| 7617836 | System and method for supplying functional water | Ju Won Kim, Doo-Keun An, Kwang Il CHOI, Pyong-Soon Jung, Yong Nam Choi | 2009-11-17 |
| 7323080 | Apparatus for treating substrate | In-Jun Kim, Jung Keun Cho, Jang-Seob Choi, Yong Nam Choi | 2008-01-29 |
| 7154611 | Spin etcher with thickness measuring system | Chung-Sik Kim | 2006-12-26 |
| 6918406 | Chemical supply apparatus | Doo-Keun An | 2005-07-19 |
| 6784106 | Wafer drying method | Chang-Ro Yoon, Pyeng-Jae Park | 2004-08-31 |
| 6757989 | Wafer drying apparatus | Chang-Ro Yoon, Pyeng-Jae Park | 2004-07-06 |
| 5873261 | Accumulator for rotary compressor | — | 1999-02-23 |