Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8398812 | Apparatus and method for treating substrates | Yi Jung Kim, Kyung Jin Seo, Jung Keun Cho | 2013-03-19 |
| 8113918 | Substrate supporting unit and single type substrate polishing apparatus using the same | Gyo-Woog Koo, Jung-Gun Cho, Ki Hoon CHOI, Jung Bong Choi, Duk Hyun Son +1 more | 2012-02-14 |
| 7637272 | Method and apparatus for cleaning and drying substrates | Jung Keun Cho, Kyo-Woog Koo | 2009-12-29 |
| 6784106 | Wafer drying method | Jeong-Yong Bae, Pyeng-Jae Park | 2004-08-31 |
| 6757989 | Wafer drying apparatus | Jeong-Yong Bae, Pyeng-Jae Park | 2004-07-06 |