Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8898926 | Substrate dryer using supercritical fluid, apparatus including the same, and method for treating substrate | Jung Keun Cho | 2014-12-02 |
| 8738174 | Substrate processing apparatus and method for loading and unloading substrates | Jaehyun You | 2014-05-27 |
| 8721834 | Apparatus for treating substrate | Jeong Min Kim | 2014-05-13 |
| 8267103 | Method and apparatus for cleaning substrates | Keun-Young Park | 2012-09-18 |
| 8256774 | Chucking member and spin head and method for chucking substrate using the chucking member | Jung Keun Cho, Bo Ram Chan Sung | 2012-09-04 |
| 8122899 | Apparatus and method for treating substrate | Jung Keun Cho, Bo Ram Chan Sung | 2012-02-28 |
| 8038838 | Spin head, method of operating the spin head and apparatus for treating substrates with the spin head | Ju Won Kim, Ki Hoon CHOI, Jung Keun Cho, Jung Bong Choi | 2011-10-18 |
| 7934513 | Facility with multi-storied process chamber for cleaning substrates and method for cleaning substrates using the facility | Joung-Hyeon Lim, Jung Keun Cho, In-Ho Bang, Woo Young Kim, Man Seok Oh +1 more | 2011-05-03 |
| 7918910 | Unit for eliminating particles and apparatus for transferring a substrate having the same | Young-Ki Ahn, Jae-Jeong Jeong, Bo Ram Chan Sung | 2011-04-05 |
| 7900853 | Apparatus for supplying chemical liquid | Si Eun Kim, Keun-Young Park | 2011-03-08 |
| 7802579 | Apparatus and method for treating substrates | Hyun Jong Kim, Jung Keun Cho | 2010-09-28 |
| 7637272 | Method and apparatus for cleaning and drying substrates | Jung Keun Cho, Chang-Ro Yoon | 2009-12-29 |