Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12416482 | Position measuring device and substrate processing apparatus including the same | Dong Yun Lee, Eon Seok Lee | 2025-09-16 |
| 8402980 | Apparatus and method of generating ultrasonic vibration and apparatus and method of cleaning a wafer using the same | Young-Ki Ahn, Jae-Jeong Jeong | 2013-03-26 |
| 8256774 | Chucking member and spin head and method for chucking substrate using the chucking member | Jung Keun Cho, Kyo-Woog Koo | 2012-09-04 |
| 8122899 | Apparatus and method for treating substrate | Kyo-Woog Koo, Jung Keun Cho | 2012-02-28 |
| 7918910 | Unit for eliminating particles and apparatus for transferring a substrate having the same | Young-Ki Ahn, Jae-Jeong Jeong, Kyo-Woog Koo | 2011-04-05 |