Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8402980 | Apparatus and method of generating ultrasonic vibration and apparatus and method of cleaning a wafer using the same | Young-Ki Ahn, Bo Ram Chan Sung | 2013-03-26 |
| 8253059 | Apparatus and method of cleaning substrate | Se Won Lee, Jung-Gun Cho | 2012-08-28 |
| 7918910 | Unit for eliminating particles and apparatus for transferring a substrate having the same | Young-Ki Ahn, Bo Ram Chan Sung, Kyo-Woog Koo | 2011-04-05 |