Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8253059 | Apparatus and method of cleaning substrate | Se Won Lee, Jae-Jeong Jeong | 2012-08-28 |
| 8113918 | Substrate supporting unit and single type substrate polishing apparatus using the same | Gyo-Woog Koo, Chang-Ro Yoon, Ki Hoon CHOI, Jung Bong Choi, Duk Hyun Son +1 more | 2012-02-14 |