Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10490427 | Apparatus for treating substrate | Seong-Soo Kim, Chan Young Heo, Oh Jin Kwon | 2019-11-26 |
| 9748118 | Substrate treating apparatus | Yu Hwan Kim, Ho Jong HWANG | 2017-08-29 |
| 8287333 | Single type substrate treating apparatus and method | Ki Hoon CHOI, Gyo-Woog Koo | 2012-10-16 |
| 8113918 | Substrate supporting unit and single type substrate polishing apparatus using the same | Gyo-Woog Koo, Chang-Ro Yoon, Jung-Gun Cho, Ki Hoon CHOI, Duk Hyun Son +1 more | 2012-02-14 |
| 8038838 | Spin head, method of operating the spin head and apparatus for treating substrates with the spin head | Ju Won Kim, Ki Hoon CHOI, Jung Keun Cho, Kyo-Woog Koo | 2011-10-18 |