Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10827126 | Electronic device for providing property information of external light source for interest object | Soon-Hwan Kwon, Hyun-Mi Kwak, Joon Ki Kim, Sol Kim, Myeong-Gi Jeong | 2020-11-03 |
| 8898926 | Substrate dryer using supercritical fluid, apparatus including the same, and method for treating substrate | Kyo-Woog Koo | 2014-12-02 |
| 8834632 | Apparatus and system for manufacturing a carbon nanotube | Ho-Soo Hwang, Sung-Soo Kim | 2014-09-16 |
| 8398812 | Apparatus and method for treating substrates | Yi Jung Kim, Kyung Jin Seo, Chang-Ro Yoon | 2013-03-19 |
| 8256774 | Chucking member and spin head and method for chucking substrate using the chucking member | Kyo-Woog Koo, Bo Ram Chan Sung | 2012-09-04 |
| 8122899 | Apparatus and method for treating substrate | Kyo-Woog Koo, Bo Ram Chan Sung | 2012-02-28 |
| 8038838 | Spin head, method of operating the spin head and apparatus for treating substrates with the spin head | Ju Won Kim, Ki Hoon CHOI, Kyo-Woog Koo, Jung Bong Choi | 2011-10-18 |
| 7934513 | Facility with multi-storied process chamber for cleaning substrates and method for cleaning substrates using the facility | Joung-Hyeon Lim, Kyo-Woog Koo, In-Ho Bang, Woo Young Kim, Man Seok Oh +1 more | 2011-05-03 |
| 7866058 | Spin head and substrate treating method using the same | Hyun Jong Kim, Ju Won Kim | 2011-01-11 |
| 7862765 | Method for synthesizing conductive composite | Ho-Soo Hwang | 2011-01-04 |
| 7802579 | Apparatus and method for treating substrates | Hyun Jong Kim, Kyo-Woog Koo | 2010-09-28 |
| 7637272 | Method and apparatus for cleaning and drying substrates | Chang-Ro Yoon, Kyo-Woog Koo | 2009-12-29 |
| 7323080 | Apparatus for treating substrate | In-Jun Kim, Jang-Seob Choi, Yong Nam Choi, Jeong-Yong Bae | 2008-01-29 |