Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11220758 | Systems and methods for thermal hydro-synthesis of semiconductor materials by holding a substrate wafer within a chamber in a vertical direction | Seom Geun Lee, Young Deuk Park, Ki-Suk Kim | 2022-01-11 |
| 8398812 | Apparatus and method for treating substrates | Kyung Jin Seo, Chang-Ro Yoon, Jung Keun Cho | 2013-03-19 |
| 7963248 | Plasma generator, substrate treating apparatus including the same and substrate treating method | — | 2011-06-21 |