Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8968487 | Wafer container cleaning device | Bum Sun Park, Bong Jin Choi | 2015-03-03 |
| 7934513 | Facility with multi-storied process chamber for cleaning substrates and method for cleaning substrates using the facility | Joung-Hyeon Lim, Jung Keun Cho, Kyo-Woog Koo, Woo Young Kim, Man Seok Oh +1 more | 2011-05-03 |
| 7611182 | Wafer transfer apparatus | Woo Young Kim, Taek Youb Lee | 2009-11-03 |