| 12396103 |
Device for etching the periphery edge of a substrate and method for controlling etching thereof |
— |
2025-08-19 |
| 12308256 |
Substrate treatment apparatus having bowl assembly |
— |
2025-05-20 |
| 12237206 |
Device for etching the periphery edge of a substrate |
— |
2025-02-25 |
| 12237205 |
Substrate support assembly for substrate treatment apparatus |
— |
2025-02-25 |
| 12170222 |
Substrate support assembly for substrate treatment apparatus |
— |
2024-12-17 |
| 12146216 |
Substrate treatment apparatus having exhaust structure |
Jun Hwan Lee, Man Je Bang |
2024-11-19 |
| 12148634 |
Device for etching the periphery edge of a substrate comprising substrate sensing unit |
— |
2024-11-19 |
| 12115562 |
Substrate treatment apparatus having back nozzle assembly |
— |
2024-10-15 |
| 12059713 |
Substrate treating apparatus comprising ultrasonic wave cleaning unit |
— |
2024-08-13 |
| 8714169 |
Spin head, apparatus for treating substrate, and method for treating substrate |
Jeong-Yong Bae, Choon Sik Kim |
2014-05-06 |
| 8435380 |
Substrate chucking member, substrate processing apparatus having the member, and method of processing substrate using the member |
Bong-joo Kim |
2013-05-07 |
| 8394234 |
Spin head and method of chucking substrate using the same |
— |
2013-03-12 |
| 8382555 |
Substrate supporting unit, and apparatus and method for polishing substrate using the same |
— |
2013-02-26 |
| 8293071 |
Spin head |
— |
2012-10-23 |
| 7611182 |
Wafer transfer apparatus |
Woo Young Kim, In-Ho Bang |
2009-11-03 |