Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8282771 | Method of processing a substrate, spin unit for supplying processing materials to a substrate, and apparatus for processing a substrate having the same | Gil Hun Song | 2012-10-09 |
| 6784106 | Wafer drying method | Jeong-Yong Bae, Chang-Ro Yoon | 2004-08-31 |
| 6757989 | Wafer drying apparatus | Jeong-Yong Bae, Chang-Ro Yoon | 2004-07-06 |