Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11594421 | Substrate treating apparatus and substrate treating method | Youngil Lee, Jungbong Choi, Seungho Lee, Gui Su PARK, Seung Hoon Oh +1 more | 2023-02-28 |
| 10699918 | Chemical supply unit and apparatus for treating a substrate | Buyoung Jung, Jin Tack Yu, Sun-Yong Park | 2020-06-30 |
| 10232415 | Apparatus for treating substrate | Ki-Ryong Choi, YOUNG CHOI, Giu Su Park, Sun-Yong Park | 2019-03-19 |
| 9587880 | Apparatus and method for drying substrate | Boong Kim, Ki Bong Kim, Oh Jin Kwon | 2017-03-07 |
| 9275852 | Substrate treating apparatus and substrate treating method | Kibong Kim, Boong Kim, Oh Jin Kwon | 2016-03-01 |
| 8282771 | Method of processing a substrate, spin unit for supplying processing materials to a substrate, and apparatus for processing a substrate having the same | Pyeng-Jae Park | 2012-10-09 |