Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11361960 | Substrate processing apparatus and substrate processing system including the same | Won Ho JANG, Jeong-Yong Bae, Woo Young Kim, Hyun-Jung Lee, Se Jin Park +3 more | 2022-06-14 |
| 10707071 | Substrate processing apparatus and substrate processing system including the same | Won Ho JANG, Hyun-Jung Lee, Se Jin Park, Yong-Sun Ko, Woo-Gwan Shim +3 more | 2020-07-07 |
| 10668403 | Source supplier for a supercritical fluid, substrate processing apparatus having the same | Jung-Min Oh, Ji Hoon Jeong, Kun-Tack Lee, Hyo-San Lee, Yong-Myung Jun | 2020-06-02 |
| 7959738 | Method of removing photoresist and method of manufacturing a semiconductor device | Dae-Hyuk Kang, Hyo-San Lee, Chang-Ki Hong, Kun-Tack Lee | 2011-06-14 |
| 7560386 | Method of manufacturing nonvolatile semiconductor memory device | Ji-Hoon Cha, Woo-gwam Shim, Chang-Ki Hong, Seung-Pil Chung | 2009-07-14 |
| 7514741 | Nonvolatile semiconductor memory device and related method | Seung-Jun Lee | 2009-04-07 |
| 7318870 | Method of cleaning semiconductor substrate | Hyung-Ho Ko, Young Jun Kim, Ki-Jong Park | 2008-01-15 |
| 7262141 | Methods for cleaning a semiconductor substrate having a recess channel region | Hyung-Ho Ko, Chang-Ki Hong, Sang-jun Choi | 2007-08-28 |