Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10668403 | Source supplier for a supercritical fluid, substrate processing apparatus having the same | Jung-Min Oh, Ji Hoon Jeong, Dong-Gyun Han, Kun-Tack Lee, Hyo-San Lee | 2020-06-02 |
| 9903651 | Sealing member and substrate processing apparatus including the same | Yong-Sun Ko, Kun-Tack Lee, Il-Sang Lee, Ji Hoon Jeong, Yong-Jhin Cho +1 more | 2018-02-27 |
| 8033401 | Wafer guide for preventing wafer breakage in semiconductor cleaning apparatus | Hea-Woong Lee, Chang-Gil Ryu, Byoung-Moon Yoon, Kang Hee Han | 2011-10-11 |