Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11648644 | Polishing pad conditioning apparatus | Eun-Seok Lee, Ja-Eung Koo, Kuen-Byul Kim, Jeong Min Na, Hyeon Dong SONG +2 more | 2023-05-16 |
| 10576582 | Spot heater and device for cleaning wafer using the same | Young-Hoo Kim, Il-Sang Lee, Yong-Sun Ko, Kun-Tack Lee, Hyo-San Lee | 2020-03-03 |
| 10340158 | Substrate cleaning apparatus | Eun-Seok Lee, Geun-Young Song, Jae Chang Lee, Yun-Seok Choi, Jin-Suk Hong | 2019-07-02 |
| 10029332 | Spot heater and device for cleaning wafer using the same | Young-Hoo Kim, Il-Sang Lee, Yong-Sun Ko, Kun-Tack Lee, Hyo-San Lee | 2018-07-24 |
| 9999957 | Polishing head and polishing carrier apparatus having the same | Yun-Seok Choi, Geun-Young Song, Ki-Yeon Chu, Jin-Suk Hong | 2018-06-19 |
| 8033401 | Wafer guide for preventing wafer breakage in semiconductor cleaning apparatus | Hea-Woong Lee, Byoung-Moon Yoon, Yong-Myung Jun, Kang Hee Han | 2011-10-11 |