Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11648644 | Polishing pad conditioning apparatus | Eun-Seok Lee, Ja-Eung Koo, Kuen-Byul Kim, Jeong Min Na, Chang-Gil Ryu +2 more | 2023-05-16 |
| 10340158 | Substrate cleaning apparatus | Eun-Seok Lee, Chang-Gil Ryu, Geun-Young Song, Jae Chang Lee, Yun-Seok Choi | 2019-07-02 |
| 9999957 | Polishing head and polishing carrier apparatus having the same | Yun-Seok Choi, Chang-Gil Ryu, Geun-Young Song, Ki-Yeon Chu | 2018-06-19 |
| 9903651 | Sealing member and substrate processing apparatus including the same | Yong-Myung Jun, Yong-Sun Ko, Kun-Tack Lee, Il-Sang Lee, Ji Hoon Jeong +1 more | 2018-02-27 |
| 9772296 | Method of inspecting a surface of a substrate and apparatus for performing the same | Byung-Bok Kang, Seok Min Kang, Bon-Ok Koo, Kyoung Hwan Kim, Myung-Woo Kim +5 more | 2017-09-26 |