Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11676824 | Chemical mechanical polishing apparatus for controlling polishing uniformity | In Kwon Kim, Seung Ho Park, Sang Won Bae, Hyo-San Lee, Sun-jae Jang | 2023-06-13 |
| 10711160 | Slurry compositions for polishing a metal layer and methods for fabricating semiconductor devices using the same | Seung Ho Park, Hyun Goo KONG, Jung Hun Kim, Sang Mi Lee, Hee Sook Cheon +4 more | 2020-07-14 |