Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10723916 | Organic film CMP slurry composition and polishing method using same | Jung Min Choi, Haruki Nojo, Yong Soon Park, Yong-Sik Yoo, Dong-Hun Kang +1 more | 2020-07-28 |
| 10345706 | Monomer for hardmask composition and hardmask composition including the monomer and method of forming patterns using the hardmask composition | Hyun-Ji SONG, Yun-Jun Kim, Young Min Kim, Hea-Jung Kim, Joon-Young Moon +8 more | 2019-07-09 |
| 10287468 | CMP slurry composition for organic film and polishing method using same | Yong-Sik Yoo, Jung Min Choi, Dong-Hun Kang, Tae Wan Kim, Yong Kuk Kim | 2019-05-14 |
| 9890255 | Modified hydrogenated polysiloxazane, composition comprising same for forming silica-based insulation layer, method for preparing composition for forming | Hyun-Ji SONG, Eun Su Park, Sang-Hak Lim, Taek-Soo Kwak, Mi Young Kim +11 more | 2018-02-13 |
| 9845444 | Cleaning composition after chemical mechanical polishing of organic film and cleaning method using the same | Ahn-Ho Lee, Chung-Kyung Jung, Dong Min KANG, Dong-Hun Kang, Dong Jin Kim +5 more | 2017-12-19 |
| 9738787 | Composition for forming silica-based insulating layer, method for preparing composition for forming silica-based insulating layer, silica-based insulating layer, and method for manufacturing silica-based insulating layer | Hui-Chan Yun, Taek-Soo Kwak, Mi Young Kim, Sang-Hak Lim, Kwen-Woo Han +8 more | 2017-08-22 |
| 9665003 | Hardmask composition, method of forming patterns using the hardmask composition and semiconductor integrated circuit device including the patterns | Yoo-Jeong Choi, Yun-Jun Kim, Young Min Kim, Hea-Jung Kim, Joon-Young Moon +8 more | 2017-05-30 |
| 9312122 | Rinse liquid for insulating film and method of rinsing insulating film | Jin-Hee Bae, Han-Song Lee, Wan-Hee Lim, Taek-Soo Kwak, Bo-Sun Kim +8 more | 2016-04-12 |
| 9240443 | Process of preparing a gap filler agent, a gap filler agent prepared using same, and a method for manufacturing semiconductor capacitor using the gap filler agent | Jin-Hee Bae, Han-Song Lee, Taek-Soo Kwak, Bo-Sun Kim, Sang Kyun Kim +8 more | 2016-01-19 |
| 8685272 | Composition for etching silicon oxide layer, method for etching semiconductor device using the same, and composition for etching semiconductor device | Hyo-San Lee, Myung Kook Park, Ho-Seok Yang, Jeong-Nam Han, Chang-Ki Hong | 2014-04-01 |