Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10345706 | Monomer for hardmask composition and hardmask composition including the monomer and method of forming patterns using the hardmask composition | Hyun-Ji SONG, Yun-Jun Kim, Go-Un Kim, Young Min Kim, Hea-Jung Kim +8 more | 2019-07-09 |
| 10018914 | Hardmask composition and method of forming patterns using the hardmask composition | Youn-Hee Nam, Mi Young Kim, You-Jung Park, Yun-Jun Kim, Hea-Jung Kim +3 more | 2018-07-10 |
| 9823566 | Monomer, hardmask composition comprising monomer, and pattern forming method using hardmask composition | Yong-Woon Yoon, Sung Jae Lee, You-Jung Park, Chul-Ho Lee, Youn-Jin Cho | 2017-11-21 |
| 9683114 | Monomer for hardmask composition, hardmask composition including the monomer, and method of forming patterns using the hardmask composition | Hea-Jung Kim, Sung Hwan Kim, Youn-Hee Nam, Yun-Jun Kim, Hyun-Ji SONG +2 more | 2017-06-20 |
| 9665003 | Hardmask composition, method of forming patterns using the hardmask composition and semiconductor integrated circuit device including the patterns | Yoo-Jeong Choi, Yun-Jun Kim, Go-Un Kim, Young Min Kim, Hea-Jung Kim +8 more | 2017-05-30 |
| 9371444 | Hardmask composition and method of forming patterns using the hardmask composition | Yoo-Jeong Choi, Yun-Jun Kim, Young Min Kim, Yu-Shin Park, Hyun-Ji SONG +2 more | 2016-06-21 |
| 9348229 | Hardmask composition and method of forming patterns using the hardmask composition | Youn-Hee Nam, Hea-Jung Kim, Sang Kyun Kim, Sung Hwan Kim, Yun-Jun Kim +1 more | 2016-05-24 |
| 9244351 | Composition for hardmask, method of forming patterns using the same, and semiconductor integrated circuit device including the patterns | Sung Jae Lee, Youn-Jin Cho, Young Min Kim, Yong-Woon Yoon | 2016-01-26 |
| 8952373 | Hardmask composition and method of forming patterns and semiconductor integrated circuit device including the patterns | Yoo-Jeong Choi, Yun-Jun Kim, Bum Jin Lee, Chung-Heon Lee, Youn-Jin Cho | 2015-02-10 |
| 8900997 | Method for forming a dual damascene structure of a semiconductor device, and a semiconductor device therewith | Youn-Jin Cho, Sung Jae Lee, You-Jung Park, Yong-Woon Yoon, Chul-Ho Lee +1 more | 2014-12-02 |