| 10345706 |
Monomer for hardmask composition and hardmask composition including the monomer and method of forming patterns using the hardmask composition |
Hyun-Ji SONG, Go-Un Kim, Young Min Kim, Hea-Jung Kim, Joon-Young Moon +8 more |
2019-07-09 |
| 10332751 |
Monomer, organic layer composition, organic layer, and method of forming patterns |
Yoo-Jeong Choi, Yu-Shin Park, You-Jung Park, Hyun-Ji SONG |
2019-06-25 |
| 10312074 |
Method of producing layer structure, layer structure, and method of forming patterns |
Min Soo Kim, Hyun-Ji SONG, Sun-Hae Kang, Sung Min Kim, Sung Hwan Kim +15 more |
2019-06-04 |
| 10066057 |
Organic layer composition, organic layer, and method of forming patterns |
Yu-Shin Park, Tae Ho Kim, You-Jung Park, Yoo-Jeong Choi, Hyo-Young Kwon +7 more |
2018-09-04 |
| 10018914 |
Hardmask composition and method of forming patterns using the hardmask composition |
Youn-Hee Nam, Mi Young Kim, You-Jung Park, Hea-Jung Kim, Joon-Young Moon +3 more |
2018-07-10 |
| 9725389 |
Monomer for a hardmask composition, hardmask composition comprising the monomer, and method for forming a pattern using the hardmask composition |
Hwan-Sung Cheon, Youn-Jin Cho, Yong-Woon Yoon, Chung-Heon Lee, Hyo-Young Kwon +1 more |
2017-08-08 |
| 9683114 |
Monomer for hardmask composition, hardmask composition including the monomer, and method of forming patterns using the hardmask composition |
Hea-Jung Kim, Sung Hwan Kim, Youn-Hee Nam, Joon-Young Moon, Hyun-Ji SONG +2 more |
2017-06-20 |
| 9671688 |
Monomer for hardmask composition, hardmask composition including said monomer, and method for forming pattern using said hardmask composition |
Seung-Wook SHIN, Hea-Jung Kim, Youn-Jin Cho, Yoo-Jeong Choi |
2017-06-06 |
| 9665003 |
Hardmask composition, method of forming patterns using the hardmask composition and semiconductor integrated circuit device including the patterns |
Yoo-Jeong Choi, Go-Un Kim, Young Min Kim, Hea-Jung Kim, Joon-Young Moon +8 more |
2017-05-30 |
| 9556094 |
Monomer, hardmask composition including monomer, and method for forming pattern by using hardmask composition |
Hyo-Young Kwon, Hea-Jung Kim, Chung-Heon Lee, Youn-Jin Cho, Yoo-Jeong Choi |
2017-01-31 |
| 9371444 |
Hardmask composition and method of forming patterns using the hardmask composition |
Yoo-Jeong Choi, Young Min Kim, Joon-Young Moon, Yu-Shin Park, Hyun-Ji SONG +2 more |
2016-06-21 |
| 9359276 |
Monomer for hardmask composition, hardmask composition including monomer, and pattern forming method using hardmask composition |
Yoo-Jeong Choi, Hyo-Young Kwon, Youn-Jin Cho, Young Min Kim, Yong-Woon Yoon +1 more |
2016-06-07 |
| 9348229 |
Hardmask composition and method of forming patterns using the hardmask composition |
Youn-Hee Nam, Hea-Jung Kim, Sang Kyun Kim, Sung Hwan Kim, Joon-Young Moon +1 more |
2016-05-24 |
| 9158201 |
Monomer for hardmask composition and hardmask composition including the monomer and method of forming patterns using the hardmask composition |
Bum Jin Lee, Youn-Jin Cho |
2015-10-13 |
| 8952373 |
Hardmask composition and method of forming patterns and semiconductor integrated circuit device including the patterns |
Yoo-Jeong Choi, Joon-Young Moon, Bum Jin Lee, Chung-Heon Lee, Youn-Jin Cho |
2015-02-10 |
