Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10345706 | Monomer for hardmask composition and hardmask composition including the monomer and method of forming patterns using the hardmask composition | Hyun-Ji SONG, Yun-Jun Kim, Go-Un Kim, Young Min Kim, Joon-Young Moon +8 more | 2019-07-09 |
| 10312074 | Method of producing layer structure, layer structure, and method of forming patterns | Min Soo Kim, Hyun-Ji SONG, Sun-Hae Kang, Sung Min Kim, Sung Hwan Kim +15 more | 2019-06-04 |
| 10018914 | Hardmask composition and method of forming patterns using the hardmask composition | Youn-Hee Nam, Mi Young Kim, You-Jung Park, Yun-Jun Kim, Joon-Young Moon +3 more | 2018-07-10 |
| 9683114 | Monomer for hardmask composition, hardmask composition including the monomer, and method of forming patterns using the hardmask composition | Sung Hwan Kim, Youn-Hee Nam, Yun-Jun Kim, Joon-Young Moon, Hyun-Ji SONG +2 more | 2017-06-20 |
| 9671688 | Monomer for hardmask composition, hardmask composition including said monomer, and method for forming pattern using said hardmask composition | Seung-Wook SHIN, Yun-Jun Kim, Youn-Jin Cho, Yoo-Jeong Choi | 2017-06-06 |
| 9665003 | Hardmask composition, method of forming patterns using the hardmask composition and semiconductor integrated circuit device including the patterns | Yoo-Jeong Choi, Yun-Jun Kim, Go-Un Kim, Young Min Kim, Joon-Young Moon +8 more | 2017-05-30 |
| 9568825 | Hardmask composition and method of forming patterns using the hardmask composition | Youn-Hee Nam, Hyun-Ji SONG | 2017-02-14 |
| 9556094 | Monomer, hardmask composition including monomer, and method for forming pattern by using hardmask composition | Yun-Jun Kim, Hyo-Young Kwon, Chung-Heon Lee, Youn-Jin Cho, Yoo-Jeong Choi | 2017-01-31 |
| 9513546 | Monomer, hard mask composition comprising said monomer, and method for forming pattern using said hard mask composition | You-Jung Park, Yo-Choul PARK, Yong-Woon Yoon, Sung Jae Lee, Chul-Ho Lee +1 more | 2016-12-06 |
| 9348229 | Hardmask composition and method of forming patterns using the hardmask composition | Youn-Hee Nam, Sang Kyun Kim, Sung Hwan Kim, Yun-Jun Kim, Joon-Young Moon +1 more | 2016-05-24 |