Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10345706 | Monomer for hardmask composition and hardmask composition including the monomer and method of forming patterns using the hardmask composition | Hyun-Ji SONG, Yun-Jun Kim, Go-Un Kim, Young Min Kim, Hea-Jung Kim +8 more | 2019-07-09 |
| 9665003 | Hardmask composition, method of forming patterns using the hardmask composition and semiconductor integrated circuit device including the patterns | Yoo-Jeong Choi, Yun-Jun Kim, Go-Un Kim, Young Min Kim, Hea-Jung Kim +8 more | 2017-05-30 |
| 9513546 | Monomer, hard mask composition comprising said monomer, and method for forming pattern using said hard mask composition | You-Jung Park, Hea-Jung Kim, Yong-Woon Yoon, Sung Jae Lee, Chul-Ho Lee +1 more | 2016-12-06 |