Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11715651 | Apparatus for and method of treating substrate | Young Dae CHUNG, Won Geun KIM, Jee Young Lee, Ji Hoon Jeong, Tae Shin KIM +2 more | 2023-08-01 |
| 11495467 | Method and apparatus for etching thin layer | Jung Suk GOH, Jae Seong LEE, Do Youn LIM, Kuk Saeng KIM, Young Dae CHUNG +12 more | 2022-11-08 |
| 11149234 | Cleaning composition, cleaning apparatus, and method of fabricating semiconductor device using the same | Mi Hyun Park, Jung-Min Oh, Young-Hoo Kim, Hyo-San Lee, Tae-Keun Kim +3 more | 2021-10-19 |
| 11135624 | Method and apparatus for substrate cleaning | Mi Young JO, Da-Jeong Kim, Jun Taek KOO | 2021-10-05 |