| 11887868 |
Substrate processing apparatus and apparatus for manufacturing integrated circuit device |
Young-Hoo Kim, Sang-Jine Park, Yong-Jhin Cho, Ji Hoon Jeong, Byung-Kwon Cho +2 more |
2024-01-30 |
| 10985036 |
Substrate processing apparatus and apparatus for manufacturing integrated circuit device |
Young-Hoo Kim, Sang-Jine Park, Yong-Jhin Cho, Ji Hoon Jeong, Byung-Kwon Cho +2 more |
2021-04-20 |
| 10818522 |
Process chamber for a supercritical process and apparatus for treating substrates having the same |
Sang-Jine Park, Byung-Kwon Cho, Yong-Jhin Cho, Yong-Sun Ko, Kwang-Wook Lee |
2020-10-27 |
| 10128246 |
Semiconductor devices including an isolation layer on a fin and methods of forming semiconductor devices including an isolation layer on a fin |
Sang-Jine Park, Bo-Un Yoon, Ha-Young Jeon, Ji-Won Yun, Won-Sang Choi |
2018-11-13 |
| 9704864 |
Semiconductor devices including an isolation layer on a fin and methods of forming semiconductor devices including an isolation layer on a fin |
Sang-Jine Park, Bo-Un Yoon, Ha-Young Jeon, Ji-Won Yun, Won-Sang Choi |
2017-07-11 |
