Issued Patents All Time
Showing 26–50 of 56 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8790470 | Etching, cleaning and drying methods using supercritical fluid and chamber systems using these methods | Hyo-San Lee, Chang-Ki Hong, Woo-Gwan Shim, Jeong-Nam Han, Jung-Min Oh +4 more | 2014-07-29 |
| 8766343 | Integrated circuit capacitors having sidewall supports | Dae-Hyuk Kang, Bo-Un Yoon, Woo-Gwan Shim, Ji-Hoon Cha, Im-Soo Park +3 more | 2014-07-01 |
| 8597081 | Chemical mechanical polishing apparatus having pad conditioning disk and pre-conditioner unit | Jae-Kwang Choi, Hong Jin Kim, Keon-Sik Seo, Sol HAN, Byoung-ho Kwon | 2013-12-03 |
| 8585917 | Etching, cleaning and drying methods using supercritical fluid and chamber systems using these methods | Hyo-San Lee, Chang-Ki Hong, Woo-Gwan Shim, Jeong-Nam Han, Jung-Min Oh +4 more | 2013-11-19 |
| 8557651 | Method of manufacturing a semiconductor device using an etchant | Hyo-San Lee, Bo-Un Yoon, Hag-Ju Cho, Sang-Jin Hyun, Hoon-Joo Na +1 more | 2013-10-15 |
| 8524569 | Methods of forming an isolation layer and methods of manufacturing semiconductor devices having an isolation layer | Dae-Hyuk Kang, Jung Won Lee, Bo-Un Yoon | 2013-09-03 |
| 8344385 | Vertical-type semiconductor device | Young-Hoo Kim, Hyo-San Lee, Sang Won Bae, Bo-Un Yoon | 2013-01-01 |
| 8211804 | Methods of forming a hole having a vertical profile and semiconductor devices having a vertical hole | Hyo-San Lee, Bo-Un Yoon, Dae-Hyuk Kang, Seong Ho Moon, So-Ra Han | 2012-07-03 |
| 8119476 | Methods of forming integrated circuit capacitors having sidewall supports and capacitors formed thereby | Dae-Hyuk Kang, Bo-Un Yoon, Woo-Gwan Shim, Ji-Hoon Cha, Im-Soo Park +3 more | 2012-02-21 |
| 8110499 | Method of forming a contact structure | Dae-Hyuk Kang, Young-Hoo Kim, Chang-Ki Hong, Jae-Dong Lee, Dae-Hong Eom +1 more | 2012-02-07 |
| 8084367 | Etching, cleaning and drying methods using supercritical fluid and chamber systems using these methods | Hyo-San Lee, Chang-Ki Hong, Woo-Gwan Shim, Jeong-Nam Han, Jung-Min Oh +4 more | 2011-12-27 |
| 7959738 | Method of removing photoresist and method of manufacturing a semiconductor device | Dae-Hyuk Kang, Hyo-San Lee, Dong-Gyun Han, Chang-Ki Hong | 2011-06-14 |
| 7857939 | Apparatus for treating wafers using supercritical fluid | Hyo-San Lee, Chang-Ki Hong, Jeong-Nam Han | 2010-12-28 |
| 7825030 | Method of forming a spacer | Yu-Kyung Kim, Woo-Gwan Shim, Chang-Ki Hong | 2010-11-02 |
| 7745338 | Method of forming fine pitch hardmask patterns and method of forming fine patterns of semiconductor device using the same | Ji-Hoon Cha, Chang-Ki Hong, Woo-Gwan Shim, Chang-Sup Mun, Ho-wook Choi | 2010-06-29 |
| 7704828 | Method of fabricating a semiconductor device | Jung-Min Oh, Jeong-Nam Han, Chang-Ki Hong, Dae-Hyuk Kang, Sung-Il Cho | 2010-04-27 |
| 7498217 | Methods of manufacturing semiconductor memory devices with unit cells having charge trapping layers | Jung-Min Oh, Jeong-Nam Han, Chang-Ki Hong, Dae-Hyuk Kang, Woo-Gwan Shim +1 more | 2009-03-03 |
| 7488688 | Method of removing oxide layer and semiconductor manufacturing apparatus for removing oxide layer | Seung-Pil Chung, Kyu-whan Chang, Sun Jung Lee, Im-Soo Park, Kwang-Wook Lee +1 more | 2009-02-10 |
| 7265040 | Cleaning solution and method for selectively removing layer in a silicidation process | Sang-Yong Kim | 2007-09-04 |
| 7237561 | Apparatus for cleaning semiconductor wafer including heating using a light source and method for cleaning wafer using the same | Im-Soo Park, Yong-Pil Han, Sang-rok Hah | 2007-07-03 |
| 7230293 | Storage nodes of a semiconductor memory | Sang-Yong Kim, Yong-Pil Han | 2007-06-12 |
| 7153370 | Method of cleaning semiconductor wafer | Yong-Pil Han, Sang-rok Hah | 2006-12-26 |
| 7141123 | Method of and apparatus for removing contaminants from surface of a substrate | Moon Hee Lee, Woo-Gwan Shim, Jong Ho Chung | 2006-11-28 |
| 7135413 | Cleaning solution for removing damaged portion of ferroelectric layer and cleaning method using the same | Kwang-Wook Lee, Im-Soo Park, Young Min Kwon, Sang-rok Hah | 2006-11-14 |
| 6903024 | Method of manufacturing storage nodes of a semiconductor memory device using a two-step etching process | Sang-Yong Kim, Yong-Pil Han | 2005-06-07 |