Issued Patents All Time
Showing 51–56 of 56 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6860277 | Single type of semiconductor wafer cleaning device | Yong-Pil Han, Sang-rok Hah | 2005-03-01 |
| 6712078 | Apparatus for cleaning semiconductor wafer and method for cleaning wafer using the same | Im-Soo Park, Yong-Pil Han, Sang-rok Hah | 2004-03-30 |
| 6701942 | Method of and apparatus for removing contaminants from surface of a substrate | Moon Hee Lee, Woo-Gwan Shim, Jong Ho Chung | 2004-03-09 |
| 6610596 | Method of forming metal interconnection using plating and semiconductor device manufactured by the method | Jong Won Lee, Bo-Un Yoon, Sang-rok Hah | 2003-08-26 |
| 6565736 | WET PROCESS FOR SEMICONDUCTOR DEVICE FABRICATION USING ANODE WATER CONTAINING OXIDATIVE SUBSTANCES AND CATHODE WATER CONTAINING REDUCTIVE SUBSTANCES, AND ANODE WATER AND CATHODE WATER USED IN THE WET PROCESS | Im-Soo Park, Young Min Kwon, Sang-rok Hah, Woo-Gwan Shim, Hyung-Ho Ko | 2003-05-20 |
| 6399552 | Aqueous cleaning solution for removing contaminants surface of circuit substrate cleaning method using the same | Kwang-Wook Lee, Yong-Sun Ko, Chang-Lyong Song | 2002-06-04 |