Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9620392 | Single type apparatus for drying a substrate and single type system for cleaning a substrate including the same | Dong Soo Kim, Jae-Phil Boo, Kang-Min Paek, Jae Hoon Choi | 2017-04-11 |
| 8882563 | Chemical mechanical polishing system | Jae-Phil Boo, Dong Soo Kim, Chan Woon Jeon, Jun Ho BAN, Ja Cheul Goo | 2014-11-11 |
| 8662956 | Conditioner of chemical mechanical polishing apparatus | Jae-Phil Boo, Dong Soo Kim, Ja Cheul Goo, Chan Woon Jeon, Jnn Ho Ban | 2014-03-04 |
| 8597081 | Chemical mechanical polishing apparatus having pad conditioning disk and pre-conditioner unit | Jae-Kwang Choi, Hong Jin Kim, Sol HAN, Kun-Tack Lee, Byoung-ho Kwon | 2013-12-03 |
| 7196011 | Apparatus and method for treating substrates | Chan-Woo Cho, Jae-Phil Boo, Myung-Seok Kim, Jong-Muk Kang, Ik-Joo Kim +2 more | 2007-03-27 |