Issued Patents All Time
Showing 1–22 of 22 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9620392 | Single type apparatus for drying a substrate and single type system for cleaning a substrate including the same | Dong Soo Kim, Kang-Min Paek, Keon-Sik Seo, Jae Hoon Choi | 2017-04-11 |
| 9421668 | CMP apparatus | Seh Kwang Lee, Youn Chul Kim, Joo Han Lee, Jae-Kwang Choi | 2016-08-23 |
| 9314901 | CMP pad conditioner, and method for producing the CMP pad conditioner | Seh Kwang Lee, Youn Chul Kim, Joo Han Lee, Jae-Kwang Choi | 2016-04-19 |
| 8882563 | Chemical mechanical polishing system | Dong Soo Kim, Keon-Sik Seo, Chan Woon Jeon, Jun Ho BAN, Ja Cheul Goo | 2014-11-11 |
| 8790158 | Chemical mechanical polishing apparatus | One-Moon Chang, Jong Bok Kim, Soo-Young Tak, Jong-Sun Ahn, Shin-Hye Kim | 2014-07-29 |
| 8734206 | Polishing pad for chemical mechanical polishing process and chemical mechanical polishing apparatus including the same | One-Moon Chang, Soo-Young Tak, Jong-Sun Ahn, Shin-Hye Kim, Kyoung-Moon Kang | 2014-05-27 |
| 8662956 | Conditioner of chemical mechanical polishing apparatus | Keon-Sik Seo, Dong Soo Kim, Ja Cheul Goo, Chan Woon Jeon, Jnn Ho Ban | 2014-03-04 |
| 7303466 | Carrier head of chemical mechanical polishing apparatus having barriers dividing pressure chamber into a plurality of pressure zones | Jue-Young Lee | 2007-12-04 |
| 7223158 | Method for polishing a semiconductor wafer | Jun-Gyu Ryu, Sang-Seon Lee, Sun-Wung Lee | 2007-05-29 |
| 7196010 | Slurry for chemical mechanical polishing process and method of manufacturing semiconductor device using the same | Young-rae Park, Jung-yup Kim, Bo-Un Yoon, Kwang-bok Kim, Jong Won Lee +3 more | 2007-03-27 |
| 7196011 | Apparatus and method for treating substrates | Chan-Woo Cho, Myung-Seok Kim, Jong-Muk Kang, Ik-Joo Kim, Jung-Hwan Sung +2 more | 2007-03-27 |
| 7081045 | Apparatus for polishing a semiconductor wafer | Jun-Gyu Ryu, Sang-Seon Lee, Sun-Wung Lee | 2006-07-25 |
| 7052368 | Polishing pad for chemical mechanical polishing apparatus | Jin Kook Kim, Sang-Seon Lee, Jong Bok Kim | 2006-05-30 |
| 6945861 | Polishing head of chemical mechanical polishing apparatus and polishing method using the same | Jong Soo Kim, Jun-Gyu Ryu, Sang-Seon Lee, Sun-Wung Lee | 2005-09-20 |
| 6921323 | Apparatus for polishing a semiconductor wafer and method therefor | Jun-Gyu Ryu, Sang-Seon Lee, Sun-Wung Lee | 2005-07-26 |
| 6881135 | Polishing head of chemical mechanical polishing apparatus and polishing method using the same | Jong Soo Kim, Jun-Gyu Ryu, Sang-Seon Lee, Sun-Wung Lee | 2005-04-19 |
| 6840846 | Polishing station of a chemical mechanical polishing apparatus | Jun-Gyu Ryu, Hyun-Sung Lee | 2005-01-11 |
| 6769973 | Polishing head of chemical mechanical polishing apparatus and polishing method using the same | Jong Soo Kim, Jun-Gyu Ryu, Sang-Seon Lee, Sun-Wung Lee | 2004-08-03 |
| 6709920 | Method of fabricating a non-volatile memory device having a tunnel-insulating layer including more than two portions of different thickness | Soo-Young Tak, Kwang-bok Kim, Kyung-Hyun Kim, Chang-Ki Hong | 2004-03-23 |
| 6652362 | Apparatus for polishing a semiconductor wafer and method therefor | Jun-Gyu Ryu, Sang-Seon Lee, Sun-Wung Lee | 2003-11-25 |
| 6626968 | Slurry for chemical mechanical polishing process and method of manufacturing semiconductor device using the same | Young-rae Park, Jung-yup Kim, Bo-Un Yoon, Kwang-bok Kim, Jong Won Lee +3 more | 2003-09-30 |
| 6383882 | Method for fabricating MOS transistor using selective silicide process | Sun-Wung Lee, Kyung-Hyun Kim, Chang-Ki Hong | 2002-05-07 |