Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7196011 | Apparatus and method for treating substrates | Chan-Woo Cho, Jae-Phil Boo, Myung-Seok Kim, Jong-Muk Kang, Ik-Joo Kim +2 more | 2007-03-27 |
| 7086132 | Method for assembling a polishing head and apparatus for detecting air leakage in the polishing head while assembling the same | Bong-hwoan Choi, Yong-Seok Ro, Doeg-Jung Kim | 2006-08-08 |
| 6754942 | Method for assembling a polishing head and apparatus for detecting air leakage in the polishing head while assembling the same | Bong-hwoan Choi, Yong-Seok Ro, Doeg-Jung Kim | 2004-06-29 |