Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11717933 | Retaining ring for use in chemical mechanical polishing and CMP apparatus having the same | — | 2023-08-08 |
| 11551940 | Roller for cleaning wafer and cleaning apparatus having the same | — | 2023-01-10 |
| 7086132 | Method for assembling a polishing head and apparatus for detecting air leakage in the polishing head while assembling the same | Bong-hwoan Choi, Jung-Hwan Sung, Doeg-Jung Kim | 2006-08-08 |
| 6754942 | Method for assembling a polishing head and apparatus for detecting air leakage in the polishing head while assembling the same | Bong-hwoan Choi, Jung-Hwan Sung, Doeg-Jung Kim | 2004-06-29 |