Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7223158 | Method for polishing a semiconductor wafer | Jae-Phil Boo, Sang-Seon Lee, Sun-Wung Lee | 2007-05-29 |
| 7081045 | Apparatus for polishing a semiconductor wafer | Jae-Phil Boo, Sang-Seon Lee, Sun-Wung Lee | 2006-07-25 |
| 6945861 | Polishing head of chemical mechanical polishing apparatus and polishing method using the same | Jae-Phil Boo, Jong Soo Kim, Sang-Seon Lee, Sun-Wung Lee | 2005-09-20 |
| 6921323 | Apparatus for polishing a semiconductor wafer and method therefor | Jae-Phil Boo, Sang-Seon Lee, Sun-Wung Lee | 2005-07-26 |
| 6881135 | Polishing head of chemical mechanical polishing apparatus and polishing method using the same | Jae-Phil Boo, Jong Soo Kim, Sang-Seon Lee, Sun-Wung Lee | 2005-04-19 |
| 6840846 | Polishing station of a chemical mechanical polishing apparatus | Jae-Phil Boo, Hyun-Sung Lee | 2005-01-11 |
| 6769973 | Polishing head of chemical mechanical polishing apparatus and polishing method using the same | Jae-Phil Boo, Jong Soo Kim, Sang-Seon Lee, Sun-Wung Lee | 2004-08-03 |
| 6652362 | Apparatus for polishing a semiconductor wafer and method therefor | Jae-Phil Boo, Sang-Seon Lee, Sun-Wung Lee | 2003-11-25 |