Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8734206 | Polishing pad for chemical mechanical polishing process and chemical mechanical polishing apparatus including the same | One-Moon Chang, Jae-Phil Boo, Soo-Young Tak, Jong-Sun Ahn, Shin-Hye Kim | 2014-05-27 |
| 8314028 | Slurry compositions and methods of polishing a layer using the slurry compositions | Gi-Sik Hong, Dong-Jun Lee, Nam-Soo Kim | 2012-11-20 |
| 8007676 | Slurry compositions, methods of preparing slurry compositions, and methods of polishing an object using slurry compositions | Jae-Hyun So, Sung-Taek Moon, Dong-Jun Lee, Nam-Soo Kim, Bong-Su Ahn | 2011-08-30 |
| 7858527 | Additive composition, slurry composition including the same, and method of polishing an object using the slurry composition | Nam-Soo Kim, Sang-Mun Chon, Young-Sam Lim, Sei-Cheol Lee, Jae-Hyun So +1 more | 2010-12-28 |
| 7662022 | Polishing pad, platen, method of monitoring, method of manufacturing, and method of detecting | Young-Sam Lim, Dong-Jun Lee, Nam-Soo Kim, Sung-Taek Moon, Jae-Hyun So | 2010-02-16 |
| 7578727 | Conditioner device for conditioning polishing pad and chemical mechanical polishing apparatus including the same | Sung Tae MOON, Dong-Jun Lee, Nam-Soo Kim, Bong-Su Ahn | 2009-08-25 |
| 7442111 | Polishing pad, platen, method of monitoring, method of manufacturing, and method of detecting | Young-Sam Lim, Dong-Jun Lee, Nam-Soo Kim, Sung-Taek Moon, Jae-Hyun So | 2008-10-28 |
| 7429367 | Method for producing improved cerium oxide abrasive particles and compositions including such particles | Dong-Jun Lee, Jae-Hyun So, Nam-Soo Kim | 2008-09-30 |
| 7402261 | Slurry compositions, methods of preparing slurry compositions, and methods of polishing an object using slurry compositions | Jae-Hyun So, Sung-Taek Moon, Dong-Jun Lee, Nam-Soo Kim, Bong-Su Ahn | 2008-07-22 |
| 7288212 | Additive composition, slurry composition including the same, and method of polishing an object using the slurry composition | Nam-Soo Kim, Sang-Mun Chon, Young-Sam Lim, Sei-Cheol Lee, Jae-Hyun So +1 more | 2007-10-30 |
| 7261621 | Pad conditioner for chemical mechanical polishing apparatus | Sung-Taok Moon, Dong-Jun Lee, Jae-Hyun So, Bong-Su Ahn | 2007-08-28 |
| 7229337 | Polishing pad, platen, method of monitoring, method of manufacturing, and method of detecting | Young-Sam Lim, Dong-Jun Lee, Nam-Soo Kim, Sung-Taek Moon, Jae-Hyun So | 2007-06-12 |