Issued Patents All Time
Showing 1–25 of 41 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7863231 | Thinner composition and method of removing photoresist using the same | Seung-Hyun Ahn, Eun-Mi Bae, Baik-Soon Choi, Dae-Joung Kim, Kwang-Sub Yoon +5 more | 2011-01-04 |
| 7858527 | Additive composition, slurry composition including the same, and method of polishing an object using the slurry composition | Nam-Soo Kim, Young-Sam Lim, Kyoung-Moon Kang, Sei-Cheol Lee, Jae-Hyun So +1 more | 2010-12-28 |
| 7678751 | Composition for removing photoresist, method of removing photoresist and method of manufacturing a semiconductor device using the same | Jung-Dae Park, Sang Eon Lee, Yang-Koo Lee, Dong-Chul Heo, Pil-Kwon Jun | 2010-03-16 |
| 7642200 | Methods of forming a thin film and methods of manufacturing a capacitor and a gate structure using the same | Jung-Ho Lee, Jun-Hyun Cho, Jung-Sik Choi | 2010-01-05 |
| 7605094 | Method of forming metal oxide using an atomic layer deposition process | Jung-Ho Lee, Jung-Sik Choi, Jun-Hyun Cho | 2009-10-20 |
| 7573568 | Method and apparatus for detecting a photolithography processing error, and method and apparatus for monitoring a photolithography process | Yu-Sin Yang, Chung-Sam Jun, Sun-Yong Choi | 2009-08-11 |
| 7433032 | Method and apparatus for inspecting defects in multiple regions with different parameters | Joung Soo Kim, Chung-Sam Jun, Yu-Sin Yang | 2008-10-07 |
| 7387988 | Thinner composition and method of removing photoresist using the same | Seung-Hyun Ahn, Eun-Mi Bae, Baik-Soon Choi, Dae-Joung Kim, Kwang-Sub Yoon +5 more | 2008-06-17 |
| 7385689 | Method and apparatus for inspecting substrate pattern | Kye-Weon Kim, Chung-Sam Jun, Ki-Suk Chung, Seong Jin Kim, Byung-Sug Lee +1 more | 2008-06-10 |
| 7311857 | Etching composition, method of preparing the same, method of etching an oxide film, and method of manufacturing a semiconductor device | Yong-Kyun Ko, In-Hoi Doh, Pil-Kwon Jun, Sang Mi Lee, Kwang-Shin Lim +1 more | 2007-12-25 |
| 7310140 | Method and apparatus for inspecting a wafer surface | Tae-Min Eom, Yu-Sin Yang, Chung-Sam Jun, Yun-Jung Jee, Joung Soo Kim +2 more | 2007-12-18 |
| 7288212 | Additive composition, slurry composition including the same, and method of polishing an object using the slurry composition | Nam-Soo Kim, Young-Sam Lim, Kyoung-Moon Kang, Sei-Cheol Lee, Jae-Hyun So +1 more | 2007-10-30 |
| 7271890 | Method and apparatus for inspecting defects | Joung Soo Kim, Yu-Sin Yang, Moon-kyung Kim, Sun-Yong Choi, Chung-Sam Jun | 2007-09-18 |
| 7258931 | Semiconductor wafers having asymmetric edge profiles that facilitate high yield processing by inhibiting particulate contamination | Gi Jung Kim, Woo-Serk Kim, Tae-Yeol Heo | 2007-08-21 |
| 7250379 | Method of forming metal oxide using an atomic layer deposition process | Jung-Ho Lee, Jung-Sik Choi, Jun-Hyun Cho | 2007-07-31 |
| 7223721 | Resist and etching by-product removing composition and resist removing method using the same | Dong-Jin Park, Kyung-Dae Kim, Jin Ho Hwang, Il-hyun Sohn, Sang-Oh Park +1 more | 2007-05-29 |
| 7183192 | Composition for removing photoresist and method of forming a bump electrode in a semiconductor device using the composition | Dong-Jin Park, In-Hoi Doh, Pil-Kwon Jun | 2007-02-27 |
| 7179537 | Spin-on glass composition and method of forming silicon oxide layer in semiconductor manufacturing process using the same | Jung-Ho Lee, Jung-Sik Choi, Hong Ki Kim, Dong-Jun Lee, Dae-Won Kang | 2007-02-20 |
| 7113274 | Method and apparatus for inspecting a substrate | Yu-Sin Yang, Sun-Yong Choi, Chung-Sam Jun | 2006-09-26 |
| 7027638 | Wafer color variation correcting method, selective wafer defect detecting method, and computer readable recording media for the same | Chung-Sam Jun, Hyoung Jin Kim, Dong-Chun Lee, Sang-bong Choi, Sung-gon Ryu | 2006-04-11 |
| 6927077 | Method and apparatus for measuring contamination of a semiconductor substrate | Tae-Min Eom, Yu-Sin Yang, Kwan-Woo Ryu, Park-Song Kim, Sun-Yong Choi +1 more | 2005-08-09 |
| 6869215 | Method and apparatus for detecting contaminants in ion-implanted wafer | Yu-Sin Yang, Sun-Yong Choi, Chung-Sam Jun, Kwan-Woo Ryu, Park-Song Kim +1 more | 2005-03-22 |
| 6870948 | Method and apparatus for numerically analyzing grain growth on semiconductor wafer using SEM image | Chung-Sam Jun, Sang-bong Choi, Kye-Weon Kim, Sang Hoon Lee, Yu-Sin Yang +2 more | 2005-03-22 |
| 6816029 | RF matching unit | Dae-Kyu Choi, Young-Min Min, Yun-Sik Yang, Jin-Man Kim | 2004-11-09 |
| 6713440 | Resist and etching by-product removing composition and resist removing method using the same | Dong-Jin Park, Kyung-Dae Kim, Jin Ho Hwang, Il-hyun Sohn, Sang-Oh Park +1 more | 2004-03-30 |