Issued Patents All Time
Showing 25 most recent of 66 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11494642 | Thickness prediction network learning method, semiconductor device manufacturing method, and semiconductor material deposition equipment | Su-il Cho, Sung Yoon Ryu, Chi Hoon Lee, Hyun-su Kwak, Jung-Won Kim | 2022-11-08 |
| 11181831 | Methods of manufacturing semiconductor device | Kyoung Hwan Lee, Young Ho Kwon, Souk Kim, Young-Hoon Sohn | 2021-11-23 |
| 11043433 | Method of inspecting surface and method of manufacturing semiconductor device | Sung Yoon Ryu, Chung-Sam Jun, Yun-Jung Jee, Gil-woo Song | 2021-06-22 |
| 11037283 | Inspecting apparatus based on hyperspectral imaging | Sung Ho JANG, Yasuhiro Hidaka, Young Kyu Park, Ye Eun PARK | 2021-06-15 |
| 11017525 | Semiconductor pattern detecting apparatus | Jae Hyung AHN, Souk Kim, Joon-Seo Song, Young-Hoon Sohn | 2021-05-25 |
| 10989520 | Methods for nondestructive measurements of thickness of underlying layers | Duck Mahn Oh, Jong-An Kim, Si-hyeon Choi, Young-Hoon Sohn, Chi Hoon Lee | 2021-04-27 |
| 10969428 | Method of inspecting pattern defect | Young-Hoon Sohn, Chung-Sam Jun | 2021-04-06 |
| 10852259 | Apparatus for X-ray inspection, and a method for manufacturing a semiconductor device using the same | Kyoung Hwan Lee, Sang Min Kim, Young-Hoon Sohn, Chi Hoon Lee | 2020-12-01 |
| 10593032 | Defect inspection method and defect inspection apparatus | Sung Yoon Ryu, Joon-Seo Song, Chung-Sam Jun, Yun-Jung Jee | 2020-03-17 |
| 10559506 | Method of inspecting semiconductor device | Min Kook Kim, Jun Chul Kim, Myung Suk Um, Ye Ny Yim | 2020-02-11 |
| 10527556 | Optical measuring method and apparatus, and method of manufacturing semiconductor device using the same | Min Ho Rim, Jung Soo Kim, Young-Hoon Sohn, Chung-Sam Jun, Yun-Jung Jee | 2020-01-07 |
| 10410937 | Optical measuring method for semiconductor wafer including a plurality of patterns and method of manufacturing semiconductor device using optical measurement | Jang-Ik Park, Bong Seok Kim, Souk Kim, Soo Seok Lee | 2019-09-10 |
| 10373796 | Method of inspecting wafer using electron beam | Souk Kim, Chung-Sam Jun, Woo-Seok Ko, Sang-Kil Lee, Kwang Il Shin +1 more | 2019-08-06 |
| 10281410 | Systems and methods of testing semiconductor devices using simultaneously scanning of a plurality of regions therein and methods of forming semiconductor devices using the same | Min Ho Rim, Chung-Sam Jun, Yun-Jung Jee | 2019-05-07 |
| 10249544 | Method of inspecting surface and method of manufacturing semiconductor device | Sung Yoon Ryu, Chung-Sam Jun, Yun-Jung Jee, Gil-woo Song | 2019-04-02 |
| 10222414 | Apparatus and method for exchanging probe | Jae Wan Hong, Jeong Hoi Kim, Sang-Kil Lee, Chung-Sam Jun | 2019-03-05 |
| 10068324 | 3D profiling system of semiconductor chip and method for operating the same | Jung Soo Kim, Jin Kwan Kim, Chung-Sam Jun, Soo Seok Lee | 2018-09-04 |
| 10001444 | Surface inspecting method | Kang-Woong Ko, Sung Yoon Ryu, Young-Hoon Sohn, Gil-woo Song, Tae-Heung Ahn +6 more | 2018-06-19 |
| 9934939 | Scanning electron microscope system capable of measuring in-cell overlay offset using high-energy electron beam and method thereof | Min Kook Kim, Woo-Seok Ko, Sang-Kil Lee, Chung-Sam Jun | 2018-04-03 |
| 9897552 | Optical transformation module and optical measurement system, and method of manufacturing a semiconductor device using optical transformation module and optical measurement system | Tae-Joong Kim, Yong-Deok Jeong, Kwang Soo Kim, Byeong Hwan Jeon, Sang-Kil Lee +1 more | 2018-02-20 |
| 9892983 | Apparatus for forming a thin layer and method of forming a thin layer on a substrate using the same | Min Kook Kim, Bang-Won Kim, Young-Jee Yoon, Sang-Kil Lee, Yoo Seok Jang +1 more | 2018-02-13 |
| 9831626 | Broadband light source and optical inspector having the same | Sung Yoon Ryu, Woo-Seok Ko, Sang-Kil Lee, Chung-Sam Jun, Seong Jin YUN | 2017-11-28 |
| 9733178 | Spectral ellipsometry measurement and data analysis device and related systems and methods | Sung Yoon Ryu, Woo-Seok Ko, Sang-Kil Lee, Chung-Sam Jun | 2017-08-15 |
| 9678020 | Apparatus and method for inspection of substrate defect | Joon-Seo Song, Woo-Seok Ko, Ji-Young Shin, Seong Jin YUN, Sang-Kil Lee +1 more | 2017-06-13 |
| 9659743 | Image creating method and imaging system for performing the same | Jung-Hwan Kim, Min Kook Kim, Sang-Kil Lee, Chung-Sam Jun | 2017-05-23 |