Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12332186 | Method and system for inspecting semiconductor wafer and method of fabricating semiconductor device using the same | Q-Han Park, Seunghyeok Son, Sujin Lee, Chan-Gi Jeon, Su-Hyun Gong +2 more | 2025-06-17 |
| 11494642 | Thickness prediction network learning method, semiconductor device manufacturing method, and semiconductor material deposition equipment | Su-il Cho, Yu-Sin Yang, Chi Hoon Lee, Hyun-su Kwak, Jung-Won Kim | 2022-11-08 |
| 11043433 | Method of inspecting surface and method of manufacturing semiconductor device | Chung-Sam Jun, Yu-Sin Yang, Yun-Jung Jee, Gil-woo Song | 2021-06-22 |
| 11004712 | Method of inspecting semiconductor wafer, inspection system for performing the same, and method of fabricating semiconductor device using the same | Joonseo Song, Souk Kim, Younghoon Sohn, Yusin Yang, Chihoon Lee | 2021-05-11 |
| 10845232 | Mass flow controller, apparatus for manufacturing semiconductor device, and method for maintenance thereof | Sangkil Lee, Yusin Yang, Q-Han Park, Hyun-Deok Lee | 2020-11-24 |
| 10593032 | Defect inspection method and defect inspection apparatus | Joon-Seo Song, Yu-Sin Yang, Chung-Sam Jun, Yun-Jung Jee | 2020-03-17 |
| 10585115 | Scanning probe inspector | Duck Mahn Oh, Young-Hoon Sohn, Chung-Sam Jun, Yun-Jung Jee | 2020-03-10 |
| 10551326 | Method for measuring semiconductor device | Hyo Hyeong Kang, Kang-Woong Ko, Gil-woo Song, Jae Hyung AHN, Chul Hyung Yoo +4 more | 2020-02-04 |
| 10269111 | Method of inspecting semiconductor wafer, an inspection system for performing the same, and a method of fabricating semiconductor device using the same | Joonseo Song, Wahseng Yap, Yunjung Jee, Yusin Yang, Chungsam Jun +3 more | 2019-04-23 |
| 10249544 | Method of inspecting surface and method of manufacturing semiconductor device | Chung-Sam Jun, Yu-Sin Yang, Yun-Jung Jee, Gil-woo Song | 2019-04-02 |
| 10088297 | Apparatus and method for measuring thickness | Younghoon Sohn, Yusin Yang, Chungsam Jun, Yunjung Jee | 2018-10-02 |
| 10001444 | Surface inspecting method | Kang-Woong Ko, Young-Hoon Sohn, Gil-woo Song, Tae-Heung Ahn, Hyoung-Jo Jeon +6 more | 2018-06-19 |
| 9831626 | Broadband light source and optical inspector having the same | Woo-Seok Ko, Yu-Sin Yang, Sang-Kil Lee, Chung-Sam Jun, Seong Jin YUN | 2017-11-28 |
| 9733178 | Spectral ellipsometry measurement and data analysis device and related systems and methods | Woo-Seok Ko, Yu-Sin Yang, Sang-Kil Lee, Chung-Sam Jun | 2017-08-15 |
| 9583402 | Method of manufacturing a semiconductor device using semiconductor measurement system | Wooseok Ko, Souk Kim, Yusin Yang, Sangkil Lee, Chungsam Jun +1 more | 2017-02-28 |
| 9417055 | Apparatus for measuring thickness of thin film, system including the apparatus, and method for measuring thickness of thin film | Sang-Kil Lee, Chung-Sam Jun, Woo-Seok Ko, Ho-Jeong Kwak, Souk Kim +2 more | 2016-08-16 |
| 8817364 | Device which produces various types of pulses by controlling the distance between the saturable absorber connectors | Soo Hyun Kim, Kyung Soo Kim, Won Sik Kwon, Hyub Lee, Jin Hwan Kim +4 more | 2014-08-26 |
| 8709184 | Single walled carbon nanotube saturable absorber production via multi-vacuum filtration method | Soo Hyun Kim, Kyung-Suo Kim, Won Sik Kwon, Hyub Lee, Jin Hwan Kim +4 more | 2014-04-29 |