| 10373796 |
Method of inspecting wafer using electron beam |
Souk Kim, Chung-Sam Jun, Sang-Kil Lee, Kwang Il Shin, Yu-Sin Yang +1 more |
2019-08-06 |
| 10001444 |
Surface inspecting method |
Kang-Woong Ko, Sung Yoon Ryu, Young-Hoon Sohn, Gil-woo Song, Tae-Heung Ahn +6 more |
2018-06-19 |
| 9934939 |
Scanning electron microscope system capable of measuring in-cell overlay offset using high-energy electron beam and method thereof |
Min Kook Kim, Yu-Sin Yang, Sang-Kil Lee, Chung-Sam Jun |
2018-04-03 |
| 9831626 |
Broadband light source and optical inspector having the same |
Sung Yoon Ryu, Yu-Sin Yang, Sang-Kil Lee, Chung-Sam Jun, Seong Jin YUN |
2017-11-28 |
| 9733178 |
Spectral ellipsometry measurement and data analysis device and related systems and methods |
Sung Yoon Ryu, Yu-Sin Yang, Sang-Kil Lee, Chung-Sam Jun |
2017-08-15 |
| 9678020 |
Apparatus and method for inspection of substrate defect |
Joon-Seo Song, Ji-Young Shin, Seong Jin YUN, Yu-Sin Yang, Sang-Kil Lee +1 more |
2017-06-13 |
| 9455206 |
Overlay measuring method and system, and method of manufacturing semiconductor device using the same |
Seong Jin YUN, Yu-Sin Yang, Sang-Kil Lee, Chung-Sam Jun |
2016-09-27 |
| 9417055 |
Apparatus for measuring thickness of thin film, system including the apparatus, and method for measuring thickness of thin film |
Sung Yoon Ryu, Sang-Kil Lee, Chung-Sam Jun, Ho-Jeong Kwak, Souk Kim +2 more |
2016-08-16 |
| 9261532 |
Conductive atomic force microscope and method of operating the same |
Hyun-Woo Kim, Young Hwan Kim, Jeong Hoi Kim, Baek-man Sung, Hyung-Su Son +5 more |
2016-02-16 |
| 9255694 |
Reflector structure of illumination optic system |
Won-Don Joo, Yu-Sin Yang, Sue-Jin Cho, Sang Don Jang, Byeong Hwan Jeon |
2016-02-09 |
| 9123503 |
Methods of fabricating microelectronic substrate inspection equipment |
Min Kook Kim, Yu-Sin Yang, Sang-Kil Lee, Chang-Hoon Choi |
2015-09-01 |
| 8841824 |
Broadband light illuminators |
Yu-Sin Yang, Sue-Jin Cho, Won-Don Joo, Min Kook Kim, Sang-Kil Lee +1 more |
2014-09-23 |
| 8729468 |
Microelectronic substrate inspection equipment using helium ion microscopy |
Min Kook Kim, Yu-Sin Yang, Sang-Kil Lee, Chang-Hoon Choi |
2014-05-20 |
| 8034641 |
Method for inspection of defects on a substrate |
Chung-Sam Jun, Hyung-Su Son, Yu-Sin Yang |
2011-10-11 |
| 7697130 |
Apparatus and method for inspecting a surface of a wafer |
Yu-Sin Yang, Young-Jee Yoon, Chung-Sam Jun |
2010-04-13 |
