Issued Patents All Time
Showing 1–25 of 25 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10241420 | Position adjusting unit of optical element and maskless exposure apparatus including the same | Tae Hyun Kim, Sang Woo BAE | 2019-03-26 |
| 9897772 | Fixing module for fixing an optical system to an optical apparatus and an optical apparatus including the same | Sang Joon Hong, Hi-Kuk Lee | 2018-02-20 |
| 9891537 | Maskless lithographic apparatus measuring accumulated amount of light | Ji-Young Chu, Shiva Ram Krishna, Tae Hyun Kim, Song Woo Bae, Won-Don Joo | 2018-02-13 |
| 9726982 | Maskless exposure device and method for compensating cumulative illumination using the same | Hi-Kuk Lee, Jae Young Jang, Jae-Hyuk Chang | 2017-08-08 |
| 9507272 | Apparatus and method of controlling chuck, and exposure apparatus and control method thereof | Ja Yul Kim, Tae Kyu Son | 2016-11-29 |
| 9436098 | Maskless exposure device, maskless exposure method and display substrate manufactured by the maskless exposure device and the maskless exposure method | Jung-Chul Heo, Hi-Kuk Lee, Jae-Hyuk Chang, Sang Hyun Lee, Jung-In Park +8 more | 2016-09-06 |
| 9366975 | Stage transferring device and position measuring method thereof | Hi-Kuk Lee, Jae-Hyuk Chang, Hyang-Shik Kong, Cha-Dong Kim, Chang Hoon Kim +2 more | 2016-06-14 |
| 9329504 | Method of aligning an exposure apparatus, method of exposing a photoresist film using the same and exposure apparatus for performing the method of exposing a photoresist film | Sang Hyun Park, Dong Seok Baek, Ki Hyun Kim, Sang Min Lee, Dong-Min Kim | 2016-05-03 |
| 9287155 | Apparatus and method of controlling chuck, and exposure apparatus and control method thereof | Ja Yul Kim, Tae Kyu Son | 2016-03-15 |
| 9255694 | Reflector structure of illumination optic system | Won-Don Joo, Woo-Seok Ko, Yu-Sin Yang, Sue-Jin Cho, Byeong Hwan Jeon | 2016-02-09 |
| 9086352 | Stage device and driving method thereof | Sang Wook Park, Oui Serg Kim, Hi-Kuk Lee, In Bae Chang | 2015-07-21 |
| 9069336 | Ultra-precision position control device and method for determining position and attitude information associated with a 6-degree-of-freedom stage thereof | Ja Yul Kim, Tae Kyu Son | 2015-06-30 |
| 9052599 | Maskless exposure apparatus and method | Sung Min Ahn | 2015-06-09 |
| 9019471 | Maskless exposure apparatus and stitching exposure method using the same | Jeong Min Kim, Sang Woo BAE | 2015-04-28 |
| 9013674 | Exposure apparatus including the exposure head and control method thereof | Sang Hyun Park, Hi-Kuk Lee | 2015-04-21 |
| 8994922 | Lens barrel support device and maskless exposure apparatus having the same | Sang Hyun Park, Sang Joon Hong, Oui Serg Kim, Dong Seok Baek | 2015-03-31 |
| 8836943 | Workpiece alignment device | Sung Min Ahn | 2014-09-16 |
| 8804098 | Maskless exposure apparatus having measurement optical unit to measure depths of focus of a plurality of beams and control method thereof | Dong Seok Baek, Ho Seok Choi, Hi-Kuk Lee, Oui Serg Kim | 2014-08-12 |
| 8755034 | Maskless exposure apparatus and method to determine exposure start position and orientation in maskless lithography | Sung Min Ahn, Tae Kyu Son | 2014-06-17 |
| 8675180 | Maskless exposure apparatus and method of alignment for overlay in maskless exposure | Sung Min Ahn, Ho Seok Choi | 2014-03-18 |
| 8593616 | Actuator, stage device, and exposure apparatus | Sang Joon Hong, Sang Hyun Park, Oui Serg Kim, Ja Choon Koo, Yong Seok Ihn +2 more | 2013-11-26 |
| 8427712 | Exposure apparatuses and methods to compress exposure data | Ho Seok Choi, Dong Seok Baek, Sang Geun Park, Myung Ho Kim, Duke Kimm +2 more | 2013-04-23 |
| 8314920 | Method of aligning an exposure apparatus, method of exposing a photoresist film using the same and exposure apparatus for performing the method of exposing a photoresist film | Sang Hyun Park, Dong Seok Baek, Ki Hyun Kim, Sang Min Lee, Dong-Min Kim | 2012-11-20 |
| 7232037 | LCD glass cassette | — | 2007-06-19 |
| 7138614 | Non-contact feeder system | Jang-Hyoun Youm | 2006-11-21 |