Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9507272 | Apparatus and method of controlling chuck, and exposure apparatus and control method thereof | Ja Yul Kim, Sang Don Jang | 2016-11-29 |
| 9287155 | Apparatus and method of controlling chuck, and exposure apparatus and control method thereof | Ja Yul Kim, Sang Don Jang | 2016-03-15 |
| 9069336 | Ultra-precision position control device and method for determining position and attitude information associated with a 6-degree-of-freedom stage thereof | Ja Yul Kim, Sang Don Jang | 2015-06-30 |
| 8755034 | Maskless exposure apparatus and method to determine exposure start position and orientation in maskless lithography | Sung Min Ahn, Sang Don Jang | 2014-06-17 |
| 6490504 | Feeding robot and control method therefor | — | 2002-12-03 |